JPH0212884B2 - - Google Patents
Info
- Publication number
- JPH0212884B2 JPH0212884B2 JP11168882A JP11168882A JPH0212884B2 JP H0212884 B2 JPH0212884 B2 JP H0212884B2 JP 11168882 A JP11168882 A JP 11168882A JP 11168882 A JP11168882 A JP 11168882A JP H0212884 B2 JPH0212884 B2 JP H0212884B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- reaction
- pressure
- hfo
- range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 33
- 239000000843 powder Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 17
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 229910052735 hafnium Inorganic materials 0.000 claims description 8
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 2
- 238000001027 hydrothermal synthesis Methods 0.000 claims 2
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000000047 product Substances 0.000 description 16
- 239000002245 particle Substances 0.000 description 15
- 238000012545 processing Methods 0.000 description 10
- 241000588731 Hafnia Species 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000013067 intermediate product Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 239000002775 capsule Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 239000012498 ultrapure water Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 150000002362 hafnium Chemical class 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11168882A JPS593022A (ja) | 1982-06-30 | 1982-06-30 | ハフニウム酸化物の超微粉末製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11168882A JPS593022A (ja) | 1982-06-30 | 1982-06-30 | ハフニウム酸化物の超微粉末製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS593022A JPS593022A (ja) | 1984-01-09 |
| JPH0212884B2 true JPH0212884B2 (ko) | 1990-03-29 |
Family
ID=14567648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11168882A Granted JPS593022A (ja) | 1982-06-30 | 1982-06-30 | ハフニウム酸化物の超微粉末製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS593022A (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100340404B1 (ko) * | 1999-06-30 | 2002-06-12 | 이형도 | 가압수열합성법에 의한 산화분말 제조방법 |
| KR101686498B1 (ko) * | 2011-11-24 | 2016-12-14 | 유니버시티 오브 매니토바 | 금속성 막의 산화 |
-
1982
- 1982-06-30 JP JP11168882A patent/JPS593022A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS593022A (ja) | 1984-01-09 |
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