JPH02120747U - - Google Patents

Info

Publication number
JPH02120747U
JPH02120747U JP3009689U JP3009689U JPH02120747U JP H02120747 U JPH02120747 U JP H02120747U JP 3009689 U JP3009689 U JP 3009689U JP 3009689 U JP3009689 U JP 3009689U JP H02120747 U JPH02120747 U JP H02120747U
Authority
JP
Japan
Prior art keywords
microbeam
current integrator
accelerator
slit
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3009689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3009689U priority Critical patent/JPH02120747U/ja
Publication of JPH02120747U publication Critical patent/JPH02120747U/ja
Pending legal-status Critical Current

Links

JP3009689U 1989-03-16 1989-03-16 Pending JPH02120747U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3009689U JPH02120747U (enExample) 1989-03-16 1989-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3009689U JPH02120747U (enExample) 1989-03-16 1989-03-16

Publications (1)

Publication Number Publication Date
JPH02120747U true JPH02120747U (enExample) 1990-09-28

Family

ID=31254856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3009689U Pending JPH02120747U (enExample) 1989-03-16 1989-03-16

Country Status (1)

Country Link
JP (1) JPH02120747U (enExample)

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