JPS6271865U - - Google Patents
Info
- Publication number
- JPS6271865U JPS6271865U JP16389885U JP16389885U JPS6271865U JP S6271865 U JPS6271865 U JP S6271865U JP 16389885 U JP16389885 U JP 16389885U JP 16389885 U JP16389885 U JP 16389885U JP S6271865 U JPS6271865 U JP S6271865U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- source section
- beam pipe
- ion source
- focusing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 6
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000004949 mass spectrometry Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16389885U JPS6271865U (enExample) | 1985-10-24 | 1985-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16389885U JPS6271865U (enExample) | 1985-10-24 | 1985-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6271865U true JPS6271865U (enExample) | 1987-05-08 |
Family
ID=31092522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16389885U Pending JPS6271865U (enExample) | 1985-10-24 | 1985-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6271865U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0224946A (ja) * | 1988-07-13 | 1990-01-26 | Origin Electric Co Ltd | 低加速イオンビーム照射装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5891643A (ja) * | 1981-11-26 | 1983-05-31 | Fujitsu Ltd | 電子ビ−ムアニ−ル方法 |
-
1985
- 1985-10-24 JP JP16389885U patent/JPS6271865U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5891643A (ja) * | 1981-11-26 | 1983-05-31 | Fujitsu Ltd | 電子ビ−ムアニ−ル方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0224946A (ja) * | 1988-07-13 | 1990-01-26 | Origin Electric Co Ltd | 低加速イオンビーム照射装置 |
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