JPS63121361U - - Google Patents

Info

Publication number
JPS63121361U
JPS63121361U JP1257887U JP1257887U JPS63121361U JP S63121361 U JPS63121361 U JP S63121361U JP 1257887 U JP1257887 U JP 1257887U JP 1257887 U JP1257887 U JP 1257887U JP S63121361 U JPS63121361 U JP S63121361U
Authority
JP
Japan
Prior art keywords
target
generating means
column
electron beam
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1257887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451414Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1257887U priority Critical patent/JPH0451414Y2/ja
Publication of JPS63121361U publication Critical patent/JPS63121361U/ja
Application granted granted Critical
Publication of JPH0451414Y2 publication Critical patent/JPH0451414Y2/ja
Expired legal-status Critical Current

Links

JP1257887U 1987-01-30 1987-01-30 Expired JPH0451414Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1257887U JPH0451414Y2 (enExample) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1257887U JPH0451414Y2 (enExample) 1987-01-30 1987-01-30

Publications (2)

Publication Number Publication Date
JPS63121361U true JPS63121361U (enExample) 1988-08-05
JPH0451414Y2 JPH0451414Y2 (enExample) 1992-12-03

Family

ID=30800839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1257887U Expired JPH0451414Y2 (enExample) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPH0451414Y2 (enExample)

Also Published As

Publication number Publication date
JPH0451414Y2 (enExample) 1992-12-03

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