JPH0451414Y2 - - Google Patents
Info
- Publication number
- JPH0451414Y2 JPH0451414Y2 JP1257887U JP1257887U JPH0451414Y2 JP H0451414 Y2 JPH0451414 Y2 JP H0451414Y2 JP 1257887 U JP1257887 U JP 1257887U JP 1257887 U JP1257887 U JP 1257887U JP H0451414 Y2 JPH0451414 Y2 JP H0451414Y2
- Authority
- JP
- Japan
- Prior art keywords
- deflection
- electron beam
- stage
- target
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 description 11
- 230000005684 electric field Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257887U JPH0451414Y2 (enExample) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257887U JPH0451414Y2 (enExample) | 1987-01-30 | 1987-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63121361U JPS63121361U (enExample) | 1988-08-05 |
| JPH0451414Y2 true JPH0451414Y2 (enExample) | 1992-12-03 |
Family
ID=30800839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1257887U Expired JPH0451414Y2 (enExample) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451414Y2 (enExample) |
-
1987
- 1987-01-30 JP JP1257887U patent/JPH0451414Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63121361U (enExample) | 1988-08-05 |
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