JPH0212041Y2 - - Google Patents

Info

Publication number
JPH0212041Y2
JPH0212041Y2 JP1983111248U JP11124883U JPH0212041Y2 JP H0212041 Y2 JPH0212041 Y2 JP H0212041Y2 JP 1983111248 U JP1983111248 U JP 1983111248U JP 11124883 U JP11124883 U JP 11124883U JP H0212041 Y2 JPH0212041 Y2 JP H0212041Y2
Authority
JP
Japan
Prior art keywords
brush
polishing
cleaning
polishing cloth
bristles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983111248U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6017947U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983111248U priority Critical patent/JPS6017947U/ja
Publication of JPS6017947U publication Critical patent/JPS6017947U/ja
Application granted granted Critical
Publication of JPH0212041Y2 publication Critical patent/JPH0212041Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP1983111248U 1983-07-18 1983-07-18 ポリシング装置の洗浄用ブラシ Granted JPS6017947U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983111248U JPS6017947U (ja) 1983-07-18 1983-07-18 ポリシング装置の洗浄用ブラシ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983111248U JPS6017947U (ja) 1983-07-18 1983-07-18 ポリシング装置の洗浄用ブラシ

Publications (2)

Publication Number Publication Date
JPS6017947U JPS6017947U (ja) 1985-02-06
JPH0212041Y2 true JPH0212041Y2 (enrdf_load_html_response) 1990-04-04

Family

ID=30258391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983111248U Granted JPS6017947U (ja) 1983-07-18 1983-07-18 ポリシング装置の洗浄用ブラシ

Country Status (1)

Country Link
JP (1) JPS6017947U (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3926673A1 (de) * 1989-08-11 1991-02-14 Wacker Chemitronic Verfahren und vorrichtung zur poliertuchaufbereitung beim chemomechanischen polieren, insbesondere von halbleiterscheiben

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54112091A (en) * 1978-02-22 1979-09-01 Fujikoshi Kikai Kogyo Kk Lap surface compensator of lapping machine

Also Published As

Publication number Publication date
JPS6017947U (ja) 1985-02-06

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