JPH0211376Y2 - - Google Patents
Info
- Publication number
- JPH0211376Y2 JPH0211376Y2 JP20398983U JP20398983U JPH0211376Y2 JP H0211376 Y2 JPH0211376 Y2 JP H0211376Y2 JP 20398983 U JP20398983 U JP 20398983U JP 20398983 U JP20398983 U JP 20398983U JP H0211376 Y2 JPH0211376 Y2 JP H0211376Y2
- Authority
- JP
- Japan
- Prior art keywords
- floor
- load
- clean room
- rectangular cylinder
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 5
- 101700004678 SLIT3 Proteins 0.000 description 4
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Intermediate Stations On Conveyors (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20398983U JPS60108934U (ja) | 1983-12-27 | 1983-12-27 | クリ−ンル−ム内の荷受け渡し装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20398983U JPS60108934U (ja) | 1983-12-27 | 1983-12-27 | クリ−ンル−ム内の荷受け渡し装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60108934U JPS60108934U (ja) | 1985-07-24 |
JPH0211376Y2 true JPH0211376Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-03-22 |
Family
ID=30766392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20398983U Granted JPS60108934U (ja) | 1983-12-27 | 1983-12-27 | クリ−ンル−ム内の荷受け渡し装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60108934U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10883292B2 (en) | 2016-08-19 | 2021-01-05 | Hewlett-Packard Development Company, L.P. | Retainers |
-
1983
- 1983-12-27 JP JP20398983U patent/JPS60108934U/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10883292B2 (en) | 2016-08-19 | 2021-01-05 | Hewlett-Packard Development Company, L.P. | Retainers |
Also Published As
Publication number | Publication date |
---|---|
JPS60108934U (ja) | 1985-07-24 |