JPH0211376Y2 - - Google Patents

Description

[Detailed description of the invention] Industrial field of application The present invention is used to transfer loads such as wafers between the floor and a load transfer device that transports dirt and dust-free loads in a clean room. A delivery device, in other words, a load transfer device is installed on the ceiling side of a clean room that blows clean air downward from the ceiling side and sucks the descending air below the floor. The present invention relates to a cargo delivery device that transfers cargo.

Structure of the conventional example and its problems In the conventional cargo transfer device, a position adjustment trolley is provided on the floor, and a vertical slit is formed in the front face of a rectangular cylinder that is erected from the position adjustment trolley. A load holder is provided that is movable up and down and has a holding arm that projects forward, and a lifting device for the load holder is disposed within a rectangular cylinder. In such a load transfer device, a lot of dust is generated due to wear and tear on the lifting drive device including the lift guide mechanism of the load holder, and this dust flows out from the rectangular cylinder through the slit into the clean room. This will have a negative impact on cleanliness. Further, since the load handled by the holding arm is located in front of the slit, dirt flowing out from the slit easily transfers to the load side.

Purpose of the invention The purpose of the invention is to provide a load transfer device in a clean room that can remove dust generated on the lifting drive side to the bottom of the floor without flowing out through the slit into the clean room. .

Composition of the invention In order to achieve the above object, the present invention provides a cargo delivery device in a clean room, which includes a positioning trolley disposed under the floor, a rectangular cylindrical body erected from the positioning trolley penetrating the floor, and Vertical slits are formed in both side plates of the rectangular cylinder, and a load holder is provided which can be raised and lowered by being guided by these slits and whose holding arms protrude forward. It is disposed inside the body, and a suction duct is connected to the lower part of the rectangular cylindrical body.

Embodiment and operation An embodiment of the present invention will be described below based on the drawings. 80 is a clean room, in which clean air 83 is blown down from the ceiling 81 side through a filter 82, and the descending air is sent to a mesh-type floor 84.
The structure is such that suction is drawn into the underfloor space 85 through the pipe. Next, details of the load conveying device 86 will be explained.
1 is a box-shaped duct arranged in a clean room 80, which includes a bottom plate 1A, a pair of left and right side plates 1B, and a top plate 1C.
A slit 3 extending over the entire length in the longitudinal direction is formed in the center of the top plate 1C in the width direction, and a large number of suction holes 4 are formed in the bottom plate 1A.
Inside the box-shaped duct 1, on the bottom plate 1A, a guide body 5, which is one of the LM guide structures, is laid over the entire length in the longitudinal direction, and the other guided body, which is guided in sliding contact with this guide body 5, is guided. 6 is the box-shaped duct 1
It is attached to the lower part of the movable stand 7 arranged inside. An endless cable body 8 is disposed inside the box-shaped duct 1 along its length. That is, the box-shaped duct 1
On one end side, there are a pair of guide wheels 9, 10 whose phases are shifted in the front and rear as well as the top and bottom;
A drive wheel 11 located below the drive wheel 10 is arranged,
Further, on the other end side, a pair of guide wheels 12, 13 whose phases are shifted in the front and rear as well as up and down directions, and a tension wheel 14 located below these guide wheels 12, 13 are arranged. The cable body 8 is disposed between these rings 9 to 14, and therefore, in the box-shaped duct 1, it is located in a pair of upper and lower parts on one side and over the entire length in the length direction. A plurality of receiving shafts 15 are provided in the box-shaped duct 1 to prevent the cables 8 from sagging. Appropriate points in the upper straight portion of the cable body 8 are connected by a connecting member 16 from the movable platform 7. An operating chamber 18 is formed on one end side of the box-shaped duct 1 by a cover frame 17, and the cable body 8 is disposed within this operating chamber 18.
A drive device 19 is provided to reciprocate in the length direction. This drive device 19 includes a motor 20 and a transmission mechanism 23 that interlocks an output shaft 21 of this motor 20 and a drive wheel shaft 22. An adjustment chamber 25 is provided at the other end of the box-shaped duct 1 by a cover frame 24.
A weight 27 is provided in the adjustment chamber 25 and can be raised and lowered by being guided by a guide rod 26, and the tension ring 14 is attached to the upper part of the weight 27. Therefore, by driving the drive device 19 forward and backward, the box-shaped duct 1
The movable base 7 can be moved back and forth within the space. A vertical shaft 29 is connected to the upper part of the other end of the movable table 7 via a bearing device 28.
is rotatably provided, and its vertical shaft 29 projects outward through the slit 3. The vertical axis 29
A rectangular plate-shaped (rectangular plate-shaped) load support part 30 is attached to the protrusion at one end in the length direction.
Furthermore, a position regulating plate 31 is attached to the upper surface of the load support section 30, and carriers (which store wafers and are an example of load) 32 are provided at the intermediate portion and the other end in the length direction of the load support section 30, respectively. can be placed freely. The carrier 32 is provided with a pair of left and right support brackets 33 on the movable base 7, which has a locking portion 32A projecting laterally at the upper end, and a plurality of upper and lower guide rods 34 are provided between these support brackets 33.
is installed. A block 35 is provided which is guided by these guide rods 34 and is movable left and right.
This block 35 is urged to move toward the other side by a spring 36 provided between it and the support bracket 33 on one side. A push-pull rod 37 along the guide rod 34 is inserted into the block 35;
A stopper plate 38 is attached to one side of this push-pull rod 37.
At the same time, an operation receiver 39 is attached to the other side. The push/pull rod 37 is supported by a buffer spring 4 provided between the operation receiver 39 and the block 35.
0, and the other side surface of the operation receiver 39 is formed into a positioning surface 39a that is V-shaped in plan view. Note that the elastic force of the buffer spring 40 is set to be greater than the elastic force of the spring 36. Therefore, when the push-pull rod 37 is pushed and moved, the block 35 moves integrally against the spring 36. The block 35
A rack part 40 is provided on the rack part 4.
1 is attached to the vertical shaft 29, so that the vertical shaft 29 can be rotated in forward and reverse directions by the push-pull movement of the push-pull rod 37.
7 and 29 are interlocked and connected. Here, when the push-pull rod 37 is fully pulled out to the other side, the load support section 31 is set so that its length direction is along the length direction of the box-shaped duct 1. A cargo delivery device 43 is located outside the box-shaped duct 1 at a proper location and on one side.
is provided on the other side, and the push/pull rod 3 is provided on the other side.
The box-shaped duct 1 is provided with an operating device 44 that can be freely opposed to the box-shaped duct 7. The operating device 44 includes a drive section 45
, an operating rod 46 that moves toward and away from the operating receiver 39 when driven by the operating rod 46, and a roller 47 attached to the inner end of the operating rod 46, and the operating rod 46 has a through hole formed in the side plate 1B. 48 into the box-shaped duct 1, and the box-shaped duct 1
The entire outside is covered by a cover 49. Here, the stroke of the operating rod 46 is set to a length necessary to rotate the load support part 30 by [90+α] degrees, and at that time, the stopper bracket 50 that restricts the rotation of the load support part 30 to 90 degrees is set. The buffer spring 40 is configured to absorb the α degree. Note that the stopper bracket 50 is attached to the vertical shaft 29 and receives the load support section 30. A suction duct 51 is disposed on the outside (lower surface side) of the bottom plate 1A of the box-shaped duct 1, and a suction pipe 52 communicates with the suction duct 51.

Next, details of the cargo delivery device 43 will be explained. The cargo delivery device 43 includes a frame 53 arranged in an underfloor space 85, a pair of guide rails 54 attached to the upper surface of the frame 53, and a guided object 55 that is slidably guided by these guide rails 54. A position adjustment trolley 56 provided on the lower surface, a driving wheel body 57 and a driven wheel body 58 arranged separately at both ends of the frame body 53, and a positioning wheel body 57 and a driven wheel body 58 which are wound between the two wheel bodies 57 and 58 and one location is connected to the position adjustment trolley. The cord body 5 connected to 56
9, and a motor 60 interlocked with the drive wheel body 57.
and a rectangular cylindrical body 6 that is erected from the center of the upper surface of the position adjustment trolley 56 and protrudes into the clean room 80 through a through groove 61 formed in the floor 84.
2, a vertical slit 63 formed on each side plate of this rectangular cylinder 62, and a movable base 64 located inside and outside of the rectangular cylinder 62 through both slits 63.
, an LM guide type guide rail 65 attached vertically to the rear inner surface of the square tube 62, a guided body 66 guided by this guide rail 65 and attached to the rear of the movable base 64, and a square tube. 62, an upper wheel 67 provided at the upper part, a lower wheel 68 provided at the lower part, and a cable 69 wound between the two wheels 67, 68 and connected at one point to the movable base 64.
and a motor 70 interlocked with the lower wheel body 68;
It consists of a load holder 71 attached across both ends of the movable body 64, and this load holder 71 has a pair of left and right holding arms 71a, 71a projecting forward. The distance between the inner surfaces of both holding arms 71a, 71a is
Although the carrier 32 is allowed to pass through, the locking portion 32A
The dimensions are set so that it does not allow the passage of. In the underfloor space 85, a suction duct 72 is communicated with the lower part of the rectangular cylinder 62. A load support stand 74 is disposed on the floor 84 via a machine stand 73.

The operation of the above embodiment will be explained below. Here, the operation of transferring the carrier 32 on the load support section 30 to the floor side by the load transfer device 43 will be explained. It can be transferred to the above. When the carrier 32 is placed on the load support part 30, the length direction of the load support part 30 is along the length direction of the box-shaped duct 1, and the load support part 30 is accommodated within the width of the box-shaped duct 1. There is. At this time, both springs 36 and 40 are fully extended, as shown by solid lines in FIG. 5, and both the block 35 and the push-pull rod 37 have moved to the other side the most. In this state, the drive device 19 is operated to move the cable 8. Then, the cable body 8 is connected via the connecting member 16 etc.
A movable platform 7, which is integral with the carrier, moves guided by the guide body 5 via the guided body 6, and stops at the location of the cargo transfer device 43 and the operating device 44 as detected by an appropriate detection means. Next, the operating device 44 is actuated to control the roller 4 via the operating rod 46.
Advance 7. Then, first, the roller 47 comes into contact with the positioning surface 39a, and pushes and moves the push-pull rod 37 as one unit. At this time, the buffer spring 4
Since the elastic force of the spring 36 is greater than the elastic force of the spring 36, the block 35 moves against the spring 36.
The vertical shaft 29 rotates via the rack 41 and pinion 42. As a result, along with the vertical shaft 29, the load support portion 3
0 swings, causing the carrier 32 to protrude outward from one side of the box-shaped duct 1. When the load support part 30 is swung 90 degrees perpendicularly, the load support part 30 comes into contact with the stopper bracket 50, and further swinging is prevented. Thereafter, the operating rod 46, that is, the push/pull rod 37 moves a little (by α), but the amount of movement is absorbed by the elastic deformation of the buffer spring 40.
This results in the state shown by the imaginary line in FIG. carrier 32
When the carrier 32 is extended, the holding arm 71a is located below the carrier 32 as shown by the imaginary line A in FIG. 3, and in this state, the lifting drive device is operated to raise the holding arm 71a. Both holding arms 71a rise on the sides of the carrier 32, engage with the locking portion 32A, and lift the carrier 32 upward from the load support portion 30 as shown by solid lines in FIG. After that, the operating device 4
4 is reversely operated to retract the operating rod 46. Then, the push-pull rod 37 is first pushed out by the elastic force of the buffer spring 40, and then the block 35 is moved toward the other side by the elastic force of the spring 36.
As a result of this movement, the vertical shaft 29 is rotated in the opposite direction through the rack part 41 and the pinion 42, and the empty load support part 30 is swung so as to fit within the box-shaped duct 1 as shown by the imaginary line in FIG. make it move. And movable table 7
is moved back. The carrier 32 received by the holding arm 71a, as shown by the solid line in FIG. It is lowered as shown by the imaginary line B in FIG. While descending, or while stopped slightly above the lowering limit, the trolley 56 is run in the forward or reverse direction, and the carrier 32 is made to face one of the load support platforms 74 distributed to the left and right, and the load is Lower it onto the support stand 74. The lowered carrier 32 is removed mechanically or manually.

During such work, clean room 8
0, the clean air 83 that is blown downward through the filter 82 descends, and the descending air is sucked into the underfloor space 85 through the floor 84, so that its cleanliness is ensured. In addition, in the cargo delivery device 43, the suction duct 7
Clean room 80 due to the negative pressure effect by 2.
from the slit 63 into the rectangular cylinder 62,
Since a suction airflow is generated that descends inside the rectangular cylinder body 62 and reaches the suction duct 72, the rectangular cylinder body 62
Dust generated inside the clean room 80 does not leak from the slit 63 into the clean room 80, and is removed via the suction duct 72 by riding on this suction airflow.
Even if dirt or the like comes out through the slit 63, the cargo handling position by the holding arm 71a is at the front, while the opening position of the slit 63 is at the side, so this dirt or the like will fall onto the carrier 32 side. There is almost no migration, clean room 80
They are sucked and removed toward the floor 84 by the air flow inside. Furthermore, on the load transfer device 86 side, an air current is generated that flows from the slit 3 into the box-shaped duct 1, through the suction hole 4, into the suction duct 51, and into the suction pipe 52, and therefore, airflow is generated within the box-shaped duct 1. The collected dirt and the like are removed by suction through the suction pipe 52 without leaking into the clean room 80 from the slit 3.

Effects of the Invention According to the cargo delivery device in a clean room according to the present invention having the above configuration, the following effects can be expected. That is, the drive unit for the position adjustment trolley and the drive unit for the load holder lifting/lowering drive unit can be disposed under the floor, and furthermore, the inside of the square cylinder can be made to have negative pressure so that suction airflow to the underside of the floor is generated. Therefore, the generated dust and the like can be removed to the underside of the floor without flowing out into the clean room through the slits, thereby maintaining the cleanliness inside the clean room. In addition, the cargo handling position by the holding arm is at the front, while the opening position of the slit is at the side.
Even if dirt or the like leaks through the slit, it will hardly migrate to the cargo side, and can be sucked and removed to the floor by the air flow inside the clean room.

[Brief explanation of drawings]

The drawings show one embodiment of the present invention, in which Fig. 1 is a longitudinal side view, Fig. 2 is a partially cutaway plan view, Fig. 3 is a front view, and Fig. 4 is a partially cutaway perspective view of the main part. , FIG. 5 is a cross-sectional plan view of the main part, and FIG. 6 is a longitudinal cross-sectional front view of the same. 1...Box-shaped duct, 7...Movable base, 29...Vertical axis, 3
0...Load support part, 32...Carrier (load), 32A...
Locking portion, 43... Load delivery device, 44... Operating device, 54... Guide rail, 55... Guided body, 5
6... Position adjustment trolley, 59... Cable body, 60... Motor,
61... Penetration groove, 62... Rectangular cylinder, 63... Slit,
64... Movable body, 65... Guide rail, 66... Guided body, 69... Rope body, 70... Motor, 71... Load holder, 71a... Holding arm, 72... Suction duct, 74
...Load support platform, 80...Clean room, 81...Ceiling, 82...Filter, 83...Clean air,
84...Floor, 85...Underfloor space, 86...Load conveyance device.

Claims (1)

[Scope of utility model registration request] A load transfer device that blows clean air downward from the ceiling and sucks the descending air below the floor.A load transfer device is installed on the ceiling side of a clean room, and loads are transferred between this load transfer device and the floor. A position adjustment trolley is disposed under the floor, a rectangular cylinder is erected from above the position adjustment trolley through the floor, and vertical slits are formed on both sides of the rectangular cylinder. A load holder is provided that is movable up and down guided by the slit and has a holding arm protruding forward, and a lifting device for the load holder is disposed within the rectangular cylinder;
Furthermore, a cargo delivery device in a clean room is characterized in that a suction duct is communicated with the lower part of the rectangular cylinder.