JPH0193727U - - Google Patents
Info
- Publication number
- JPH0193727U JPH0193727U JP19085287U JP19085287U JPH0193727U JP H0193727 U JPH0193727 U JP H0193727U JP 19085287 U JP19085287 U JP 19085287U JP 19085287 U JP19085287 U JP 19085287U JP H0193727 U JPH0193727 U JP H0193727U
- Authority
- JP
- Japan
- Prior art keywords
- reaction vessel
- semiconductor wafer
- processing apparatus
- heating
- wafer processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19085287U JPH0193727U (cs) | 1987-12-14 | 1987-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19085287U JPH0193727U (cs) | 1987-12-14 | 1987-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0193727U true JPH0193727U (cs) | 1989-06-20 |
Family
ID=31481791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19085287U Pending JPH0193727U (cs) | 1987-12-14 | 1987-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0193727U (cs) |
-
1987
- 1987-12-14 JP JP19085287U patent/JPH0193727U/ja active Pending
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