JPH0192153U - - Google Patents
Info
- Publication number
- JPH0192153U JPH0192153U JP18763787U JP18763787U JPH0192153U JP H0192153 U JPH0192153 U JP H0192153U JP 18763787 U JP18763787 U JP 18763787U JP 18763787 U JP18763787 U JP 18763787U JP H0192153 U JPH0192153 U JP H0192153U
- Authority
- JP
- Japan
- Prior art keywords
- light
- photocurrent
- outputting
- detection signal
- determining means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18763787U JPH0192153U (enrdf_load_html_response) | 1987-12-09 | 1987-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18763787U JPH0192153U (enrdf_load_html_response) | 1987-12-09 | 1987-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0192153U true JPH0192153U (enrdf_load_html_response) | 1989-06-16 |
Family
ID=31478776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18763787U Pending JPH0192153U (enrdf_load_html_response) | 1987-12-09 | 1987-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192153U (enrdf_load_html_response) |
-
1987
- 1987-12-09 JP JP18763787U patent/JPH0192153U/ja active Pending
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