JPH0187268U - - Google Patents
Info
- Publication number
- JPH0187268U JPH0187268U JP18259587U JP18259587U JPH0187268U JP H0187268 U JPH0187268 U JP H0187268U JP 18259587 U JP18259587 U JP 18259587U JP 18259587 U JP18259587 U JP 18259587U JP H0187268 U JPH0187268 U JP H0187268U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- measuring means
- microscope
- inspecting
- probes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 2
- 239000000523 sample Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18259587U JPH0187268U (enrdf_load_stackoverflow) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18259587U JPH0187268U (enrdf_load_stackoverflow) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187268U true JPH0187268U (enrdf_load_stackoverflow) | 1989-06-08 |
Family
ID=31474042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18259587U Pending JPH0187268U (enrdf_load_stackoverflow) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187268U (enrdf_load_stackoverflow) |
-
1987
- 1987-11-30 JP JP18259587U patent/JPH0187268U/ja active Pending
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