JPH0187157U - - Google Patents

Info

Publication number
JPH0187157U
JPH0187157U JP18040387U JP18040387U JPH0187157U JP H0187157 U JPH0187157 U JP H0187157U JP 18040387 U JP18040387 U JP 18040387U JP 18040387 U JP18040387 U JP 18040387U JP H0187157 U JPH0187157 U JP H0187157U
Authority
JP
Japan
Prior art keywords
wafer
tray
forming apparatus
film forming
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18040387U
Other languages
English (en)
Other versions
JPH0519329Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987180403U priority Critical patent/JPH0519329Y2/ja
Publication of JPH0187157U publication Critical patent/JPH0187157U/ja
Application granted granted Critical
Publication of JPH0519329Y2 publication Critical patent/JPH0519329Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は実施例の要部を示す正面図と側断面図
、第２図は成膜装置を説明する側断面図、第３図
は従来例の要部を示す正面図と側断面図、である
。 図において、１は真空槽、２は原料源、３，３
ａ，３ｂはウエーハデイツシユ、４ａ，４ｂはウ
エーハ位置決めピン、５ａ，５ｂはウエーハ止め
ピン、６ａ，６ｂは穴、７は補助具、８はボルト
、９は突起、Ｍは原料、Ｗはウエーハ、である。

Claims (1)

    【実用新案登録請求の範囲】
  1. 原料を放出する原料源と、複数のウエーハを原
    料源に対向させて支持するウエーハデイツシユと
    が真空槽内に配設されて、原料をウエーハに被着
    する成膜装置であつて、ウエーハデイツシユの各
    ウエーハに対する支持が、ウエーハ裏面の全面を
    覆つて該ウエーハを支持しウエーハデイツシユに
    着脱可能な補助具を介することを特徴とする成膜
    装置。
JP1987180403U 1987-11-26 1987-11-26 Expired - Lifetime JPH0519329Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987180403U JPH0519329Y2 (ja) 1987-11-26 1987-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987180403U JPH0519329Y2 (ja) 1987-11-26 1987-11-26

Publications (2)

Publication Number Publication Date
JPH0187157U true JPH0187157U (ja) 1989-06-08
JPH0519329Y2 JPH0519329Y2 (ja) 1993-05-21

Family

ID=31471925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987180403U Expired - Lifetime JPH0519329Y2 (ja) 1987-11-26 1987-11-26

Country Status (1)

Country Link
JP (1) JPH0519329Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5852680U (ja) * 1981-10-05 1983-04-09 松下電器産業株式会社 ビデオカセツト
JPS6255558U (ja) * 1985-09-24 1987-04-06

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763367A (en) * 1980-10-03 1982-04-16 Nippon Paint Co Ltd Inhibitor of phase separation of film and composition of coating compound containing it

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5852680U (ja) * 1981-10-05 1983-04-09 松下電器産業株式会社 ビデオカセツト
JPS6255558U (ja) * 1985-09-24 1987-04-06

Also Published As

Publication number Publication date
JPH0519329Y2 (ja) 1993-05-21

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