JPH0314148U - - Google Patents

Info

Publication number
JPH0314148U
JPH0314148U JP7576489U JP7576489U JPH0314148U JP H0314148 U JPH0314148 U JP H0314148U JP 7576489 U JP7576489 U JP 7576489U JP 7576489 U JP7576489 U JP 7576489U JP H0314148 U JPH0314148 U JP H0314148U
Authority
JP
Japan
Prior art keywords
substrate
forming apparatus
film forming
cart
line film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7576489U
Other languages
English (en)
Other versions
JPH0726363Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7576489U priority Critical patent/JPH0726363Y2/ja
Publication of JPH0314148U publication Critical patent/JPH0314148U/ja
Application granted granted Critical
Publication of JPH0726363Y2 publication Critical patent/JPH0726363Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図及び第２図は本考案の一実施例による搬
送用基板カートの縦断面図、第３図は第２図の一
部平面図、第４図は本考案の一実施例が適用され
るインライン式成膜装置の概略構成図、第５図は
従来装置の逆スパツタ室の概略構成図である。 ３……クリーニング室、１０……搬送ローラ、
１１……基板、１２……基板カート、１４……ベ
ース、２０……アースシールド板、２１……基板
ホルダ、２２……サブホルダ。

Claims (1)

  1. 【実用新案登録請求の範囲】 インライン式成膜装置の各処理位置に基板を搬
    送するための搬送用基板カートであつて、 基板が装着される基板ホルダ部と、前記基板ホ
    ルダ部背面側に所定間隔を介して設けられ、異常
    放電を防止するためのシールド板とを備えたイン
    ライン式成膜装置の搬送用基板カート。
JP7576489U 1989-06-28 1989-06-28 インライン式成膜装置 Expired - Lifetime JPH0726363Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7576489U JPH0726363Y2 (ja) 1989-06-28 1989-06-28 インライン式成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7576489U JPH0726363Y2 (ja) 1989-06-28 1989-06-28 インライン式成膜装置

Publications (2)

Publication Number Publication Date
JPH0314148U true JPH0314148U (ja) 1991-02-13
JPH0726363Y2 JPH0726363Y2 (ja) 1995-06-14

Family

ID=31616628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7576489U Expired - Lifetime JPH0726363Y2 (ja) 1989-06-28 1989-06-28 インライン式成膜装置

Country Status (1)

Country Link
JP (1) JPH0726363Y2 (ja)

Also Published As

Publication number Publication date
JPH0726363Y2 (ja) 1995-06-14

Similar Documents

Publication Publication Date Title
USD286586S (en) Chair
USD981970S1 (en) Substrate mounting plate for substrate processing apparatus
JPH0314148U (ja)
JPH023463U (ja)
USD346578S (en) License plate frame
JPH03113340U (ja)
USD266081S (en) Heat releasing plate for mounting semiconductor components
USD288760S (en) Cabinet panel
JPH0252436U (ja)
JPH0453061U (ja)
USD288644S (en) Cabinet panel
JPH0311055U (ja)
JPS6245825U (ja)
USD288758S (en) Cabinet panel
USD288643S (en) Cabinet panel
JPS63157054U (ja)
JPH0378062U (ja)
JPH03128660U (ja)
USD286291S (en) Printer
USD266069S (en) Heat releasing plate for mounting semiconductor components
JPS6422495U (ja)
JPS59100721U (ja) 果実類のリタ−ンコンベア
JPH0187157U (ja)
JPH0249950U (ja)
JPH0466117U (ja)