JPH023463U - - Google Patents

Info

Publication number
JPH023463U
JPH023463U JP8256688U JP8256688U JPH023463U JP H023463 U JPH023463 U JP H023463U JP 8256688 U JP8256688 U JP 8256688U JP 8256688 U JP8256688 U JP 8256688U JP H023463 U JPH023463 U JP H023463U
Authority
JP
Japan
Prior art keywords
roller
target
sputtering device
substrate
prevention plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8256688U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8256688U priority Critical patent/JPH023463U/ja
Publication of JPH023463U publication Critical patent/JPH023463U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例によるスパツタリ
ング装置を示す横断面図、第２図は従来のスパツ
タリング装置を示す横断面図、第３図は第２図の
トレーのない部分における横断面図である。図に
おいて、１は基板、２はトレー、３はターゲツト
、４は搬送用ローラー、６はターゲツトのスパツ
タ面、８はローラーと接触する箇所に設けられた
突起、９はローラー防着板である。なお、図中、
同一符号は同一、または相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 基板を搬送するローラーがターゲツトのスパツ
    タされる面上のどの位置から見ても見えなくなる
    ように、ローラとターゲツトとの間に防着板を設
    けたことを特徴とするスパツタリング装置。
JP8256688U 1988-06-21 1988-06-21 Pending JPH023463U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8256688U JPH023463U (ja) 1988-06-21 1988-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8256688U JPH023463U (ja) 1988-06-21 1988-06-21

Publications (1)

Publication Number Publication Date
JPH023463U true JPH023463U (ja) 1990-01-10

Family

ID=31307316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8256688U Pending JPH023463U (ja) 1988-06-21 1988-06-21

Country Status (1)

Country Link
JP (1) JPH023463U (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9635957B2 (en) 2005-09-12 2017-05-02 Rtc Industries, Inc. Product management display system
US9713393B2 (en) 2005-09-12 2017-07-25 Rtc Industries, Inc. Product management display system
US9730531B2 (en) 2005-09-12 2017-08-15 Rtc Industries, Inc. Product management display system with trackless pusher mechanism
US9750354B2 (en) 2005-09-12 2017-09-05 Rtc Industries, Inc. Product management display system
US9820585B2 (en) 2005-09-12 2017-11-21 Rtc Industries, Inc. Product management display system with trackless pusher mechanism
US9820584B2 (en) 2005-09-12 2017-11-21 Rtc Industries, Inc. Product management display system
US9895007B2 (en) 2005-09-12 2018-02-20 Rtc Industries, Inc. Product management display system with trackless pusher mechanism

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9635957B2 (en) 2005-09-12 2017-05-02 Rtc Industries, Inc. Product management display system
US9713393B2 (en) 2005-09-12 2017-07-25 Rtc Industries, Inc. Product management display system
US9730531B2 (en) 2005-09-12 2017-08-15 Rtc Industries, Inc. Product management display system with trackless pusher mechanism
US9750354B2 (en) 2005-09-12 2017-09-05 Rtc Industries, Inc. Product management display system
US9820585B2 (en) 2005-09-12 2017-11-21 Rtc Industries, Inc. Product management display system with trackless pusher mechanism
US9820584B2 (en) 2005-09-12 2017-11-21 Rtc Industries, Inc. Product management display system
US9895007B2 (en) 2005-09-12 2018-02-20 Rtc Industries, Inc. Product management display system with trackless pusher mechanism
US10555624B2 (en) 2005-09-12 2020-02-11 Rtc Industries, Inc. Product management display system with trackless pusher mechanism

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