JPH03113340U - - Google Patents

Info

Publication number
JPH03113340U
JPH03113340U JP2302990U JP2302990U JPH03113340U JP H03113340 U JPH03113340 U JP H03113340U JP 2302990 U JP2302990 U JP 2302990U JP 2302990 U JP2302990 U JP 2302990U JP H03113340 U JPH03113340 U JP H03113340U
Authority
JP
Japan
Prior art keywords
substrate
conveyance rollers
conveyance
support surface
rollers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2302990U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2302990U priority Critical patent/JPH03113340U/ja
Publication of JPH03113340U publication Critical patent/JPH03113340U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Rollers For Roller Conveyors For Transfer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例１を示す構成図、第２
図は本考案の実施例２を示す構成図である。 １……ガラス基板、２……金属製搬送ローラ、
３……絶縁性搬送ローラ、４……収容トレ。

Claims (1)

  1. 【実用新案登録請求の範囲】 基板に送りを与える基板搬送装置であつて、 基板の搬送方向に沿つて並列に配設された基板
    送り用の複数の搬送ローラを有し、 一枚の基板を支持する必要な前記搬送ローラの
    組のうち少なくとも１個の搬送ローラは、基板の
    支持面が電気的に接地可能な金属素材にて構成し
    てあり、残りの搬送ローラは、基板支持面が基板
    保護用の弾力性樹脂にて構成されていることを特
    徴とする基板搬送装置。
JP2302990U 1990-03-07 1990-03-07 Pending JPH03113340U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2302990U JPH03113340U (ja) 1990-03-07 1990-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2302990U JPH03113340U (ja) 1990-03-07 1990-03-07

Publications (1)

Publication Number Publication Date
JPH03113340U true JPH03113340U (ja) 1991-11-19

Family

ID=31526031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2302990U Pending JPH03113340U (ja) 1990-03-07 1990-03-07

Country Status (1)

Country Link
JP (1) JPH03113340U (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003050600A1 (fr) * 2001-12-13 2003-06-19 Sumitomo Precision Products Co., Ltd Systeme de traitement de substrat et dispositif de sechage de substrat
KR100814336B1 (ko) * 2006-10-12 2008-03-18 한화테크엠주식회사 컨베이어의 롤러 샤프트 그라운드 장치
JP2011029318A (ja) * 2009-07-23 2011-02-10 Tokyo Electron Ltd 基板搬送装置
WO2011121632A1 (ja) * 2010-03-29 2011-10-06 キヤノンアネルバ株式会社 搬送機構及びこれを用いた真空処理装置と電子デバイスの製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003050600A1 (fr) * 2001-12-13 2003-06-19 Sumitomo Precision Products Co., Ltd Systeme de traitement de substrat et dispositif de sechage de substrat
KR100814336B1 (ko) * 2006-10-12 2008-03-18 한화테크엠주식회사 컨베이어의 롤러 샤프트 그라운드 장치
JP2011029318A (ja) * 2009-07-23 2011-02-10 Tokyo Electron Ltd 基板搬送装置
WO2011121632A1 (ja) * 2010-03-29 2011-10-06 キヤノンアネルバ株式会社 搬送機構及びこれを用いた真空処理装置と電子デバイスの製造方法

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