JPH0299964U - - Google Patents

Info

Publication number
JPH0299964U
JPH0299964U JP14329289U JP14329289U JPH0299964U JP H0299964 U JPH0299964 U JP H0299964U JP 14329289 U JP14329289 U JP 14329289U JP 14329289 U JP14329289 U JP 14329289U JP H0299964 U JPH0299964 U JP H0299964U
Authority
JP
Japan
Prior art keywords
wafer support
small holes
supply device
gas supply
plasma film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14329289U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14329289U priority Critical patent/JPH0299964U/ja
Publication of JPH0299964U publication Critical patent/JPH0299964U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第１図は従来のプラズマ膜堆積装置の概略断面
図、第２図は本考案の製造方法で使用するプラズ
マ堆積装置の一例を示す概略断面図である。 １……容器、２……ウエハ支持体、３……ガス
供給器、４……半導体ウエハ、５，５′……小孔
。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) ウエハ支持体とこれに平行なガス供給器を
    有し、上記ガス供給器のウエハ支持体に対向する
    面に多数の小孔を有し、上記小孔の分布密度が周
    縁部において高いプラズマ膜堆積装置。 (2) ウエハ支持体とこれに平行なガス供給器を
    有し、上記ガス供給器のウエハ支持体に対向する
    面に一様に分布する多数の小孔を有し、上記小孔
    の孔径が周縁部において大きい実用新案登録請求
    の範囲第１項記載のプラズマ膜堆積装置。
JP14329289U 1989-12-12 1989-12-12 Pending JPH0299964U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14329289U JPH0299964U (ja) 1989-12-12 1989-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14329289U JPH0299964U (ja) 1989-12-12 1989-12-12

Publications (1)

Publication Number Publication Date
JPH0299964U true JPH0299964U (ja) 1990-08-09

Family

ID=31409983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14329289U Pending JPH0299964U (ja) 1989-12-12 1989-12-12

Country Status (1)

Country Link
JP (1) JPH0299964U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004190132A (ja) * 2002-11-29 2004-07-08 Kyocera Corp ホットワイヤｃｖｄ装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053751A (ja) * 1983-09-05 1985-03-27 三菱重工業株式会社 冷蔵庫付自動車用空調装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053751A (ja) * 1983-09-05 1985-03-27 三菱重工業株式会社 冷蔵庫付自動車用空調装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004190132A (ja) * 2002-11-29 2004-07-08 Kyocera Corp ホットワイヤｃｖｄ装置

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