JPH0174511U - - Google Patents
Info
- Publication number
- JPH0174511U JPH0174511U JP1987169673U JP16967387U JPH0174511U JP H0174511 U JPH0174511 U JP H0174511U JP 1987169673 U JP1987169673 U JP 1987169673U JP 16967387 U JP16967387 U JP 16967387U JP H0174511 U JPH0174511 U JP H0174511U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- sample stage
- measuring device
- thickness measuring
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000001634 microspectroscopy Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は第１の実施例の試料台の斜視図、第２
図は第１の実施例の試料台を用いた顕微分光装置
からなる膜厚計の実施例概要図、第３図は第２の
実施例の試料台の斜視図、第４図は第３の実施例
の試料台の斜視図である。
１……試料台、２……光透過性基板、３……薄
膜、７……ピン、８……ピンの挿入孔、９……支
持部、１０……空間、１４……対物レンズ、１５
……ハーフミラー、１６……ハロゲンランプ、１
７……コリメーターレンズ、１８……結像レンズ
、１９……分光器、２０……撮像素子、２１……
信号処理部、２２……出力部、３２……支持部、
４６……段付状のせり出し部（支持部）。
Figure 1 is a perspective view of the sample stage of the first embodiment;
The figure is a schematic diagram of an embodiment of a film thickness meter consisting of a microspectroscope using the sample stage of the first embodiment, FIG. 3 is a perspective view of the sample stage of the second embodiment, and FIG. 4 is a perspective view of the sample stage of the second embodiment. FIG. 3 is a perspective view of the sample stage of the example. DESCRIPTION OF SYMBOLS 1... Sample stage, 2... Light-transmissive substrate, 3... Thin film, 7... Pin, 8... Pin insertion hole, 9... Support part, 10... Space, 14... Objective lens, 15
...Half mirror, 16...Halogen lamp, 1
7...Collimator lens, 18...Imaging lens, 19...Spectroscope, 20...Imaging element, 21...
Signal processing section, 22... Output section, 32... Support section,
46...Stepped protruding portion (supporting portion).
Claims (1)
て、試料台に、膜厚測定すべき薄膜を表面側に有
する光透過性基板を部分的に載置するための支持
部を設け、光透過性基板の裏面側に空間を形成す
ることを特徴とする膜厚測定装置。 (2) 支持部が、試料台表面に形成されたピン挿
入孔に挿入され、試料台表面より高さ１mm以上の
突出する３個以上のピンである実用新案登録請求
の範囲第(1)項記載の膜厚測定装置。[Scope of Claim for Utility Model Registration] (1) In a film thickness measuring device consisting of a microspectroscopy device, a method for partially placing a light-transmissive substrate having a thin film to be measured for film thickness on the surface side on a sample stage. A film thickness measuring device characterized in that a supporting portion is provided and a space is formed on the back side of a light-transmitting substrate. (2) Utility model registration claim Paragraph (1) in which the support part is three or more pins that are inserted into pin insertion holes formed on the surface of the sample stage and protrude by a height of 1 mm or more from the surface of the sample stage. The film thickness measuring device described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169673U JPH0174511U (en) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169673U JPH0174511U (en) | 1987-11-06 | 1987-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174511U true JPH0174511U (en) | 1989-05-19 |
Family
ID=31459943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987169673U Pending JPH0174511U (en) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174511U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017161269A (en) * | 2016-03-08 | 2017-09-14 | パナソニックＩｐマネジメント株式会社 | Liquid droplet measurement method and liquid droplet measurement device |
-
1987
- 1987-11-06 JP JP1987169673U patent/JPH0174511U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017161269A (en) * | 2016-03-08 | 2017-09-14 | パナソニックＩｐマネジメント株式会社 | Liquid droplet measurement method and liquid droplet measurement device |
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