JPS61144461U - - Google Patents
Info
- Publication number
- JPS61144461U JPS61144461U JP2850685U JP2850685U JPS61144461U JP S61144461 U JPS61144461 U JP S61144461U JP 2850685 U JP2850685 U JP 2850685U JP 2850685 U JP2850685 U JP 2850685U JP S61144461 U JPS61144461 U JP S61144461U
- Authority
- JP
- Japan
- Prior art keywords
- spectrometer
- thin film
- utility
- optical path
- receiving element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
第１図は、本考案の一実施例をなす装置の構成
図、第２，３図は本考案の他の実施例を示す装置
の構成図、及び第４図イ，ロは、それぞれ同上装
置、及び従来装置による測定結果を示す波形図で
ある。
１，６，７……光拡散部材、２……分光器、３
……受光素子、Ｓ……試料。
Fig. 1 is a block diagram of a device that constitutes one embodiment of the present invention, Figs. 2 and 3 are block diagrams of a device showing other embodiments of the present invention, and Fig. 4 A and B respectively show the same device. , and a waveform diagram showing measurement results by a conventional device. 1, 6, 7...Light diffusion member, 2...Spectroscope, 3
...Photodetector, S...Sample.
Claims (1)
配設してなる薄膜特性測定用分光計。 A spectrometer for measuring thin film characteristics, with a light diffusing member placed on the optical path connecting the spectrometer and the light receiving element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2850685U JPS61144461U (en) | 1985-02-27 | 1985-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2850685U JPS61144461U (en) | 1985-02-27 | 1985-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61144461U true JPS61144461U (en) | 1986-09-06 |
Family
ID=30526440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2850685U Pending JPS61144461U (en) | 1985-02-27 | 1985-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61144461U (en) |
-
1985
- 1985-02-27 JP JP2850685U patent/JPS61144461U/ja active Pending