JPH0271206U - - Google Patents
Info
- Publication number
- JPH0271206U JPH0271206U JP15139488U JP15139488U JPH0271206U JP H0271206 U JPH0271206 U JP H0271206U JP 15139488 U JP15139488 U JP 15139488U JP 15139488 U JP15139488 U JP 15139488U JP H0271206 U JPH0271206 U JP H0271206U
- Authority
- JP
- Japan
- Prior art keywords
- film
- film thickness
- measuring
- measuring device
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は、本考案の実施例を示す構成図である
。
１……白色光源、５……対物レンズ、６……ハ
ーフミラー、１０……分光器、１１検出器、１３
……表示装置。
FIG. 1 is a block diagram showing an embodiment of the present invention. 1... White light source, 5... Objective lens, 6... Half mirror, 10... Spectrometer, 11 Detector, 13
...display device.
Claims (1)
分光測定することにより、膜の厚さを測定する膜
厚測定装置において、分光曲線を膜厚測定時以外
であつても、表示装置上にリアルタイム表示する
機能を有する膜厚測定装置。 In a film thickness measuring device that measures the thickness of a film by irradiating white light onto the measurement target and spectrally measuring the interference light from the film, the spectral curve can be displayed on the display even when not measuring the film thickness. Film thickness measuring device with real-time display function.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15139488U JPH0271206U (en) | 1988-11-21 | 1988-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15139488U JPH0271206U (en) | 1988-11-21 | 1988-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0271206U true JPH0271206U (en) | 1990-05-30 |
Family
ID=31425401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15139488U Pending JPH0271206U (en) | 1988-11-21 | 1988-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0271206U (en) |
-
1988
- 1988-11-21 JP JP15139488U patent/JPH0271206U/ja active Pending