JPH0170864U - - Google Patents

Info

Publication number
JPH0170864U
JPH0170864U JP1987164223U JP16422387U JPH0170864U JP H0170864 U JPH0170864 U JP H0170864U JP 1987164223 U JP1987164223 U JP 1987164223U JP 16422387 U JP16422387 U JP 16422387U JP H0170864 U JPH0170864 U JP H0170864U
Authority
JP
Japan
Prior art keywords
target
monitoring
ito
forming apparatus
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987164223U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069016Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987164223U priority Critical patent/JPH069016Y2/ja
Publication of JPH0170864U publication Critical patent/JPH0170864U/ja
Application granted granted Critical
Publication of JPH069016Y2 publication Critical patent/JPH069016Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987164223U 1987-10-26 1987-10-26 透明電極の製造装置 Expired - Lifetime JPH069016Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987164223U JPH069016Y2 (ja) 1987-10-26 1987-10-26 透明電極の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987164223U JPH069016Y2 (ja) 1987-10-26 1987-10-26 透明電極の製造装置

Publications (2)

Publication Number Publication Date
JPH0170864U true JPH0170864U (OSRAM) 1989-05-11
JPH069016Y2 JPH069016Y2 (ja) 1994-03-09

Family

ID=31449646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987164223U Expired - Lifetime JPH069016Y2 (ja) 1987-10-26 1987-10-26 透明電極の製造装置

Country Status (1)

Country Link
JP (1) JPH069016Y2 (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082660A (ja) * 1983-10-08 1985-05-10 Konishiroku Photo Ind Co Ltd 酸化物層の形成装置
JPS60130008A (ja) * 1983-12-15 1985-07-11 ダイセル化学工業株式会社 透明導電性膜の形成方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082660A (ja) * 1983-10-08 1985-05-10 Konishiroku Photo Ind Co Ltd 酸化物層の形成装置
JPS60130008A (ja) * 1983-12-15 1985-07-11 ダイセル化学工業株式会社 透明導電性膜の形成方法

Also Published As

Publication number Publication date
JPH069016Y2 (ja) 1994-03-09

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