JPH0170864U - - Google Patents

Info

Publication number
JPH0170864U
JPH0170864U JP1987164223U JP16422387U JPH0170864U JP H0170864 U JPH0170864 U JP H0170864U JP 1987164223 U JP1987164223 U JP 1987164223U JP 16422387 U JP16422387 U JP 16422387U JP H0170864 U JPH0170864 U JP H0170864U
Authority
JP
Japan
Prior art keywords
target
monitoring
ito
forming apparatus
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987164223U
Other languages
English (en)
Other versions
JPH069016Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987164223U priority Critical patent/JPH069016Y2/ja
Publication of JPH0170864U publication Critical patent/JPH0170864U/ja
Application granted granted Critical
Publication of JPH069016Y2 publication Critical patent/JPH069016Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す構成図、第２
図は従来例を示す構成図、第３図はターゲツト表
面の時間的変化を示す図、第４図は本考案の一実
施例によるＯ２流量を示す図、第５図は本考案と
従来のＩＴＯスパツタ膜中のＯ２量を対比して示
す図である。 １……真空槽、２……ガラス基板、３……ＩＴ
Ｏターゲツト、４……Ａｒ用ガス管、５……Ｏ２
用ガス管、７……モニター、８……制御回路。

Claims (1)

    【実用新案登録請求の範囲】
  1. Ｉｎ２Ｏ３−Ｓｎ２Ｏ３酸化物をターゲツトと
    して、真空槽内でスパツタリングにより基板上に
    ＩＴＯ膜を作成する装置において、前記ターゲツ
    ト表面をモニターする手段、及び該モニター手段
    の出力により前記真空槽内へのＯ２ガス混入量を
    調整する手段を設けたことを特徴とするＩＴＯス
    パツタ膜作成装置。
JP1987164223U 1987-10-26 1987-10-26 透明電極の製造装置 Expired - Lifetime JPH069016Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987164223U JPH069016Y2 (ja) 1987-10-26 1987-10-26 透明電極の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987164223U JPH069016Y2 (ja) 1987-10-26 1987-10-26 透明電極の製造装置

Publications (2)

Publication Number Publication Date
JPH0170864U true JPH0170864U (ja) 1989-05-11
JPH069016Y2 JPH069016Y2 (ja) 1994-03-09

Family

ID=31449646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987164223U Expired - Lifetime JPH069016Y2 (ja) 1987-10-26 1987-10-26 透明電極の製造装置

Country Status (1)

Country Link
JP (1) JPH069016Y2 (ja)

Also Published As

Publication number Publication date
JPH069016Y2 (ja) 1994-03-09

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