JPH02106457U - - Google Patents
Info
- Publication number
- JPH02106457U JPH02106457U JP1399489U JP1399489U JPH02106457U JP H02106457 U JPH02106457 U JP H02106457U JP 1399489 U JP1399489 U JP 1399489U JP 1399489 U JP1399489 U JP 1399489U JP H02106457 U JPH02106457 U JP H02106457U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film forming
- forming apparatus
- metal particles
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 239000002923 metal particle Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 238000010891 electric arc Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 244000144985 peep Species 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
図面は、本考案の薄膜形成装置の１実施例を示
し、第１図は一部の断面図、第２図は全体の概略
図である。 １…真空容器、８…基板、１０…覗き窓、１１
…バイアス用電源、１２…開口、１５…窓板、１
８…電極。
し、第１図は一部の断面図、第２図は全体の概略
図である。 １…真空容器、８…基板、１０…覗き窓、１１
…バイアス用電源、１２…開口、１５…窓板、１
８…電極。
Claims (1)
- 【実用新案登録請求の範囲】 真空容器内でアーク放電により蒸発金属粒子を
イオン化し、薄膜形成用基板にイオン化した前記
金属粒子を付着させて金属薄膜を形成する薄膜形
成装置において、 前記容器に形成された覗き窓用の開口と、前記
開口を気密に閉塞した窓板と、バイアス用電源の
正端子に接続され先端部が前記窓板の内面に当接
した電極とを備えた薄膜形成装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1399489U JPH02106457U (ja) | 1989-02-08 | 1989-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1399489U JPH02106457U (ja) | 1989-02-08 | 1989-02-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106457U true JPH02106457U (ja) | 1990-08-23 |
Family
ID=31224792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1399489U Pending JPH02106457U (ja) | 1989-02-08 | 1989-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106457U (ja) |
-
1989
- 1989-02-08 JP JP1399489U patent/JPH02106457U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO1992003841A3 (de) | Vorrichtung zur materialverdampfung mittels vakuumlichtbogenentladung und verfahren | |
| JPH02106457U (ja) | ||
| JPH0469465U (ja) | ||
| JPS6413119U (ja) | ||
| JPH0183063U (ja) | ||
| JPH0238463U (ja) | ||
| JPH0415832U (ja) | ||
| JPH01142453U (ja) | ||
| JPS62110264U (ja) | ||
| JPH0322063U (ja) | ||
| JPS6414159U (ja) | ||
| JPH0214359U (ja) | ||
| JPS62182971U (ja) | ||
| JPS62157968U (ja) | ||
| JPH0251259U (ja) | ||
| JPS62110266U (ja) | ||
| JPH0254225U (ja) | ||
| JPH01118467U (ja) | ||
| JPS61187373U (ja) | ||
| JPS6373358U (ja) | ||
| JPH0326955U (ja) | ||
| JPS62147335U (ja) | ||
| JPH02104559U (ja) | ||
| JPS6311557U (ja) | ||
| JPS63143569U (ja) |