JPS6163833U - - Google Patents

Info

Publication number
JPS6163833U
JPS6163833U JP14834984U JP14834984U JPS6163833U JP S6163833 U JPS6163833 U JP S6163833U JP 14834984 U JP14834984 U JP 14834984U JP 14834984 U JP14834984 U JP 14834984U JP S6163833 U JPS6163833 U JP S6163833U
Authority
JP
Japan
Prior art keywords
vacuum chamber
plasma cvd
cvd apparatus
trap
evacuates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14834984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14834984U priority Critical patent/JPS6163833U/ja
Publication of JPS6163833U publication Critical patent/JPS6163833U/ja
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
JP14834984U 1984-09-28 1984-09-28 Pending JPS6163833U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14834984U JPS6163833U (OSRAM) 1984-09-28 1984-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14834984U JPS6163833U (OSRAM) 1984-09-28 1984-09-28

Publications (1)

Publication Number Publication Date
JPS6163833U true JPS6163833U (OSRAM) 1986-04-30

Family

ID=30706564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14834984U Pending JPS6163833U (OSRAM) 1984-09-28 1984-09-28

Country Status (1)

Country Link
JP (1) JPS6163833U (OSRAM)

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