JPH0158650B2 - - Google Patents
Info
- Publication number
- JPH0158650B2 JPH0158650B2 JP15393083A JP15393083A JPH0158650B2 JP H0158650 B2 JPH0158650 B2 JP H0158650B2 JP 15393083 A JP15393083 A JP 15393083A JP 15393083 A JP15393083 A JP 15393083A JP H0158650 B2 JPH0158650 B2 JP H0158650B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- fixing ring
- tube holder
- process tube
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 27
- 238000009792 diffusion process Methods 0.000 claims description 11
- 239000011810 insulating material Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 4
- 239000012494 Quartz wool Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15393083A JPS6045017A (ja) | 1983-08-22 | 1983-08-22 | 拡散炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15393083A JPS6045017A (ja) | 1983-08-22 | 1983-08-22 | 拡散炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6045017A JPS6045017A (ja) | 1985-03-11 |
| JPH0158650B2 true JPH0158650B2 (enrdf_load_stackoverflow) | 1989-12-13 |
Family
ID=15573185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15393083A Granted JPS6045017A (ja) | 1983-08-22 | 1983-08-22 | 拡散炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6045017A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62115712A (ja) * | 1985-11-14 | 1987-05-27 | Nec Kyushu Ltd | 拡散炉装置 |
| JPH0340414Y2 (enrdf_load_stackoverflow) * | 1986-11-20 | 1991-08-26 | ||
| JPH02257612A (ja) * | 1989-03-30 | 1990-10-18 | Fujitsu Ltd | 熱処理炉 |
| JP2854907B2 (ja) * | 1990-01-11 | 1999-02-10 | シチズン時計株式会社 | 順送りプレス抜金型 |
-
1983
- 1983-08-22 JP JP15393083A patent/JPS6045017A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6045017A (ja) | 1985-03-11 |
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