JPH0158134B2 - - Google Patents

Info

Publication number
JPH0158134B2
JPH0158134B2 JP58188125A JP18812583A JPH0158134B2 JP H0158134 B2 JPH0158134 B2 JP H0158134B2 JP 58188125 A JP58188125 A JP 58188125A JP 18812583 A JP18812583 A JP 18812583A JP H0158134 B2 JPH0158134 B2 JP H0158134B2
Authority
JP
Japan
Prior art keywords
titanium
titanium nitride
glass
sputtering
titanium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58188125A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6081048A (ja
Inventor
Toku Tsutsugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP18812583A priority Critical patent/JPS6081048A/ja
Publication of JPS6081048A publication Critical patent/JPS6081048A/ja
Publication of JPH0158134B2 publication Critical patent/JPH0158134B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP18812583A 1983-10-06 1983-10-06 窒化チタン薄膜付きガラスおよびその作製方法 Granted JPS6081048A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18812583A JPS6081048A (ja) 1983-10-06 1983-10-06 窒化チタン薄膜付きガラスおよびその作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18812583A JPS6081048A (ja) 1983-10-06 1983-10-06 窒化チタン薄膜付きガラスおよびその作製方法

Publications (2)

Publication Number Publication Date
JPS6081048A JPS6081048A (ja) 1985-05-09
JPH0158134B2 true JPH0158134B2 (enrdf_load_stackoverflow) 1989-12-08

Family

ID=16218148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18812583A Granted JPS6081048A (ja) 1983-10-06 1983-10-06 窒化チタン薄膜付きガラスおよびその作製方法

Country Status (1)

Country Link
JP (1) JPS6081048A (enrdf_load_stackoverflow)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200011U (enrdf_load_stackoverflow) * 1986-06-12 1987-12-19
CA1333270C (en) * 1987-03-26 1994-11-29 Ppg Industries Ohio, Inc. Sputtered titanium oxynitride films
JP2555737B2 (ja) * 1988-09-01 1996-11-20 旭硝子株式会社 自動車用窓ガラス
EP0564709B1 (de) * 1991-12-13 1996-01-24 Balzers Aktiengesellschaft Beschichtetes transparentes Substrat, Verwendung hiervon, Verfahren und Anlage zur Herstellung der Schichten, und Hafnium-Oxinitrid (HfOxNy) mit 1,5 x/y 3 und 2,6 n 2,8
JP3473485B2 (ja) 1999-04-08 2003-12-02 日本電気株式会社 薄膜抵抗体およびその製造方法
EP1743876A3 (en) * 2003-12-22 2007-07-25 Cardinal CG Company Graded photocatalytic coatings
EP1713736B1 (en) 2003-12-22 2016-04-27 Cardinal CG Company Graded photocatalytic coatings and methods of making such coatings
US7713632B2 (en) 2004-07-12 2010-05-11 Cardinal Cg Company Low-maintenance coatings
US7923114B2 (en) 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
US8092660B2 (en) 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
JP5589310B2 (ja) * 2009-06-03 2014-09-17 株式会社ニコン 被膜形成物の製造方法
US10604442B2 (en) 2016-11-17 2020-03-31 Cardinal Cg Company Static-dissipative coating technology

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5335798B2 (enrdf_load_stackoverflow) * 1973-09-28 1978-09-28

Also Published As

Publication number Publication date
JPS6081048A (ja) 1985-05-09

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