JPH0157283B2 - - Google Patents
Info
- Publication number
- JPH0157283B2 JPH0157283B2 JP54018868A JP1886879A JPH0157283B2 JP H0157283 B2 JPH0157283 B2 JP H0157283B2 JP 54018868 A JP54018868 A JP 54018868A JP 1886879 A JP1886879 A JP 1886879A JP H0157283 B2 JPH0157283 B2 JP H0157283B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- output
- inspected
- detection
- black
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 32
- 230000007547 defect Effects 0.000 claims description 24
- 238000007689 inspection Methods 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 238000003786 synthesis reaction Methods 0.000 claims description 9
- 230000000630 rising effect Effects 0.000 claims description 8
- 230000035945 sensitivity Effects 0.000 claims description 7
- 230000002950 deficient Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Classifications
- 
        - G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
 
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Medical Preparation Storing Or Oral Administration Devices (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP1886879A JPS55110905A (en) | 1979-02-20 | 1979-02-20 | Defect detecting device | 
| US06/121,516 US4302773A (en) | 1979-02-20 | 1980-02-14 | Defect inspection system | 
| CA345,970A CA1126855A (en) | 1979-02-20 | 1980-02-19 | Defect inspection system | 
| DE19803006341 DE3006341A1 (de) | 1979-02-20 | 1980-02-20 | Defektpruefsystem | 
| GB8005710A GB2046899B (en) | 1979-02-20 | 1980-02-20 | Defect inspection system | 
| FR8003716A FR2449884A1 (fr) | 1979-02-20 | 1980-02-20 | Systeme de detection de defauts | 
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP1886879A JPS55110905A (en) | 1979-02-20 | 1979-02-20 | Defect detecting device | 
Publications (2)
| Publication Number | Publication Date | 
|---|---|
| JPS55110905A JPS55110905A (en) | 1980-08-27 | 
| JPH0157283B2 true JPH0157283B2 (OSRAM) | 1989-12-05 | 
Family
ID=11983513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date | 
|---|---|---|---|
| JP1886879A Granted JPS55110905A (en) | 1979-02-20 | 1979-02-20 | Defect detecting device | 
Country Status (6)
| Country | Link | 
|---|---|
| US (1) | US4302773A (OSRAM) | 
| JP (1) | JPS55110905A (OSRAM) | 
| CA (1) | CA1126855A (OSRAM) | 
| DE (1) | DE3006341A1 (OSRAM) | 
| FR (1) | FR2449884A1 (OSRAM) | 
| GB (1) | GB2046899B (OSRAM) | 
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| AU553069B2 (en) * | 1981-07-17 | 1986-07-03 | W.R. Grace & Co.-Conn. | Radial scan, pulsed light article inspection ccv system 0 | 
| US4598420A (en) * | 1983-12-08 | 1986-07-01 | Mts Systems Corporation | Optical grid analyzer system for automatically determining strain in deformed sheet metal | 
| GB2175396B (en) * | 1985-05-22 | 1989-06-28 | Filler Protection Developments | Apparatus for examining objects | 
| JPS6219738A (ja) * | 1985-07-19 | 1987-01-28 | Tokan Kogyo Co Ltd | 使い捨てコツプのカ−ル部不良検査装置 | 
| DE3734294A1 (de) * | 1987-10-09 | 1989-04-27 | Sick Optik Elektronik Erwin | Optische oberflaechen-inspektionsvorrichtung | 
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| US3584963A (en) * | 1968-12-27 | 1971-06-15 | Rca Corp | Optical flaw detector | 
| US3749496A (en) * | 1971-07-16 | 1973-07-31 | Bendix Corp | Automatic quality control surface inspection system for determining the character of a surface by measuring the shape and intensity of a modulated beam | 
| US3700909A (en) * | 1972-03-09 | 1972-10-24 | Columbia Research Corp | Method for detecting pinhole defects in foil material | 
| US4025201A (en) * | 1975-04-21 | 1977-05-24 | Ball Brothers Service Corporation | Method and apparatus for video inspection of articles of manufacture by decussate paths of light | 
| DE2617111C3 (de) * | 1976-04-17 | 1986-02-20 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren zum Feststellen einer Bewegung im Überwachungsbereich einer Fernsehkamera | 
| JPS5571937A (en) * | 1978-11-24 | 1980-05-30 | Kanebo Ltd | Method of and device for inspecting surface | 
- 
        1979
        - 1979-02-20 JP JP1886879A patent/JPS55110905A/ja active Granted
 
- 
        1980
        - 1980-02-14 US US06/121,516 patent/US4302773A/en not_active Expired - Lifetime
- 1980-02-19 CA CA345,970A patent/CA1126855A/en not_active Expired
- 1980-02-20 FR FR8003716A patent/FR2449884A1/fr active Granted
- 1980-02-20 GB GB8005710A patent/GB2046899B/en not_active Expired
- 1980-02-20 DE DE19803006341 patent/DE3006341A1/de active Granted
 
Also Published As
| Publication number | Publication date | 
|---|---|
| US4302773A (en) | 1981-11-24 | 
| FR2449884B1 (OSRAM) | 1984-11-02 | 
| GB2046899B (en) | 1983-10-26 | 
| CA1126855A (en) | 1982-06-29 | 
| JPS55110905A (en) | 1980-08-27 | 
| DE3006341A1 (de) | 1980-08-28 | 
| GB2046899A (en) | 1980-11-19 | 
| FR2449884A1 (fr) | 1980-09-19 | 
| DE3006341C2 (OSRAM) | 1990-01-25 | 
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