Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP10412280ApriorityCriticalpatent/JPS5728333A/ja
Publication of JPS5728333ApublicationCriticalpatent/JPS5728333A/ja
Publication of JPH0147892B2publicationCriticalpatent/JPH0147892B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
H01J37/3045—Object or beam position registration
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Electron Beam Exposure
(AREA)
Image Analysis
(AREA)
Image Processing
(AREA)
JP10412280A1980-07-291980-07-29Method for detecting aligning mark
GrantedJPS5728333A
(en)