JPH0147036B2 - - Google Patents
Info
- Publication number
- JPH0147036B2 JPH0147036B2 JP55083195A JP8319580A JPH0147036B2 JP H0147036 B2 JPH0147036 B2 JP H0147036B2 JP 55083195 A JP55083195 A JP 55083195A JP 8319580 A JP8319580 A JP 8319580A JP H0147036 B2 JPH0147036 B2 JP H0147036B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- conductor
- insulating layer
- thick film
- multilayer wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 53
- 239000010408 film Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 238000007639 printing Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
Landscapes
- Electronic Switches (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8319580A JPS578175A (en) | 1980-06-19 | 1980-06-19 | Multilayer interconnection structure for crossover and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8319580A JPS578175A (en) | 1980-06-19 | 1980-06-19 | Multilayer interconnection structure for crossover and manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS578175A JPS578175A (en) | 1982-01-16 |
| JPH0147036B2 true JPH0147036B2 (US20100154137A1-20100624-C00004.png) | 1989-10-12 |
Family
ID=13795542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8319580A Granted JPS578175A (en) | 1980-06-19 | 1980-06-19 | Multilayer interconnection structure for crossover and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS578175A (US20100154137A1-20100624-C00004.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3785506T2 (de) * | 1986-07-29 | 1993-08-12 | Tdk Corp | Halbleitende keramische zusammensetzung, sowie kondensator aus halbleitender keramik. |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5053863A (US20100154137A1-20100624-C00004.png) * | 1973-09-12 | 1975-05-13 | ||
| JPS5422576A (en) * | 1977-07-21 | 1979-02-20 | Nippon Electric Co | Method of manufacturing substrate for integrated circuit |
| JPS5456163A (en) * | 1977-10-11 | 1979-05-04 | Fujitsu Ltd | Preparation of ceramic multilayer circuit substrate |
-
1980
- 1980-06-19 JP JP8319580A patent/JPS578175A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5053863A (US20100154137A1-20100624-C00004.png) * | 1973-09-12 | 1975-05-13 | ||
| JPS5422576A (en) * | 1977-07-21 | 1979-02-20 | Nippon Electric Co | Method of manufacturing substrate for integrated circuit |
| JPS5456163A (en) * | 1977-10-11 | 1979-05-04 | Fujitsu Ltd | Preparation of ceramic multilayer circuit substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS578175A (en) | 1982-01-16 |
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