JPH0145051B2 - - Google Patents
Info
- Publication number
- JPH0145051B2 JPH0145051B2 JP53081448A JP8144878A JPH0145051B2 JP H0145051 B2 JPH0145051 B2 JP H0145051B2 JP 53081448 A JP53081448 A JP 53081448A JP 8144878 A JP8144878 A JP 8144878A JP H0145051 B2 JPH0145051 B2 JP H0145051B2
- Authority
- JP
- Japan
- Prior art keywords
- aromatic
- acid
- carbonamide
- sulfonamide
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8144878A JPS559510A (en) | 1978-07-06 | 1978-07-06 | Heat resistant photoresist composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8144878A JPS559510A (en) | 1978-07-06 | 1978-07-06 | Heat resistant photoresist composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS559510A JPS559510A (en) | 1980-01-23 |
| JPH0145051B2 true JPH0145051B2 (enrdf_load_stackoverflow) | 1989-10-02 |
Family
ID=13746672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8144878A Granted JPS559510A (en) | 1978-07-06 | 1978-07-06 | Heat resistant photoresist composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS559510A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0646302B2 (ja) * | 1987-06-22 | 1994-06-15 | 株式会社日立製作所 | 耐熱感光性重合体組成物 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6046421B2 (ja) * | 1978-03-01 | 1985-10-16 | 東レ株式会社 | 耐熱性感光材料 |
-
1978
- 1978-07-06 JP JP8144878A patent/JPS559510A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS559510A (en) | 1980-01-23 |
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