JPH0142628B2 - - Google Patents

Info

Publication number
JPH0142628B2
JPH0142628B2 JP18803583A JP18803583A JPH0142628B2 JP H0142628 B2 JPH0142628 B2 JP H0142628B2 JP 18803583 A JP18803583 A JP 18803583A JP 18803583 A JP18803583 A JP 18803583A JP H0142628 B2 JPH0142628 B2 JP H0142628B2
Authority
JP
Japan
Prior art keywords
surface treatment
level
plate
target level
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18803583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6079728A (ja
Inventor
Nobutoshi Ookami
Masaru Kitagawa
Hisao Nishizawa
Masakazu Saida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP58188035A priority Critical patent/JPS6079728A/ja
Priority to US06/611,420 priority patent/US4569717A/en
Publication of JPS6079728A publication Critical patent/JPS6079728A/ja
Publication of JPH0142628B2 publication Critical patent/JPH0142628B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/72—Repair or correction of mask defects
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP58188035A 1983-05-24 1983-10-06 表面処理方法 Granted JPS6079728A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58188035A JPS6079728A (ja) 1983-10-06 1983-10-06 表面処理方法
US06/611,420 US4569717A (en) 1983-05-24 1984-05-17 Method of surface treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58188035A JPS6079728A (ja) 1983-10-06 1983-10-06 表面処理方法

Publications (2)

Publication Number Publication Date
JPS6079728A JPS6079728A (ja) 1985-05-07
JPH0142628B2 true JPH0142628B2 (enExample) 1989-09-13

Family

ID=16216524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58188035A Granted JPS6079728A (ja) 1983-05-24 1983-10-06 表面処理方法

Country Status (1)

Country Link
JP (1) JPS6079728A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2598508B1 (fr) * 1986-05-09 1989-05-12 Guillaume Michel Procede et appareil de determination de fin d'attaque d'une surface gravee
JP4952123B2 (ja) * 2005-12-13 2012-06-13 パナソニック株式会社 コンデンサユニット

Also Published As

Publication number Publication date
JPS6079728A (ja) 1985-05-07

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