JPS6240701B2 - - Google Patents

Info

Publication number
JPS6240701B2
JPS6240701B2 JP8474383A JP8474383A JPS6240701B2 JP S6240701 B2 JPS6240701 B2 JP S6240701B2 JP 8474383 A JP8474383 A JP 8474383A JP 8474383 A JP8474383 A JP 8474383A JP S6240701 B2 JPS6240701 B2 JP S6240701B2
Authority
JP
Japan
Prior art keywords
level
time
surface treatment
end point
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8474383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59210442A (ja
Inventor
Masakazu Saida
Takeshi Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP58084743A priority Critical patent/JPS59210442A/ja
Publication of JPS59210442A publication Critical patent/JPS59210442A/ja
Publication of JPS6240701B2 publication Critical patent/JPS6240701B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP58084743A 1983-05-13 1983-05-13 表面処理方法 Granted JPS59210442A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58084743A JPS59210442A (ja) 1983-05-13 1983-05-13 表面処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58084743A JPS59210442A (ja) 1983-05-13 1983-05-13 表面処理方法

Publications (2)

Publication Number Publication Date
JPS59210442A JPS59210442A (ja) 1984-11-29
JPS6240701B2 true JPS6240701B2 (enExample) 1987-08-29

Family

ID=13839167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58084743A Granted JPS59210442A (ja) 1983-05-13 1983-05-13 表面処理方法

Country Status (1)

Country Link
JP (1) JPS59210442A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0161108U (enExample) * 1987-10-13 1989-04-18
JPH0240208U (enExample) * 1988-09-12 1990-03-19
US11925477B2 (en) 2006-05-03 2024-03-12 Nike, Inc. Athletic or other performance sensing systems

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6435418A (en) * 1987-07-30 1989-02-06 Matsushita Electric Industrial Co Ltd Method for evaluating liquid crystal orientational capacity of oriented film

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0161108U (enExample) * 1987-10-13 1989-04-18
JPH0240208U (enExample) * 1988-09-12 1990-03-19
US11925477B2 (en) 2006-05-03 2024-03-12 Nike, Inc. Athletic or other performance sensing systems
US12263012B2 (en) 2006-05-03 2025-04-01 Nike, Inc. Athletic or other performance sensing systems

Also Published As

Publication number Publication date
JPS59210442A (ja) 1984-11-29

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