JPH0141466B2 - - Google Patents
Info
- Publication number
- JPH0141466B2 JPH0141466B2 JP13520280A JP13520280A JPH0141466B2 JP H0141466 B2 JPH0141466 B2 JP H0141466B2 JP 13520280 A JP13520280 A JP 13520280A JP 13520280 A JP13520280 A JP 13520280A JP H0141466 B2 JPH0141466 B2 JP H0141466B2
- Authority
- JP
- Japan
- Prior art keywords
- base
- lower table
- guide shaft
- upper table
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13520280A JPS5761436A (en) | 1980-09-30 | 1980-09-30 | X-y table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13520280A JPS5761436A (en) | 1980-09-30 | 1980-09-30 | X-y table |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5761436A JPS5761436A (en) | 1982-04-13 |
JPH0141466B2 true JPH0141466B2 (US20100012521A1-20100121-C00001.png) | 1989-09-05 |
Family
ID=15146232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13520280A Granted JPS5761436A (en) | 1980-09-30 | 1980-09-30 | X-y table |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5761436A (US20100012521A1-20100121-C00001.png) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917141U (ja) * | 1982-07-23 | 1984-02-02 | 桐生機械株式会社 | 2軸スライダ |
JPS63162132A (ja) * | 1986-12-26 | 1988-07-05 | Nippon Thompson Co Ltd | Xyテ−ブル |
KR0129662B1 (ko) * | 1987-10-30 | 1998-04-07 | 고다까 토시오 | 이동 테이블 장치 |
JP2775875B2 (ja) * | 1989-07-24 | 1998-07-16 | ブラザー工業株式会社 | ミシン用布厚検出装置 |
JP4612777B2 (ja) | 2001-03-09 | 2011-01-12 | キヤノン株式会社 | 移動案内装置、それを用いた露光装置及び半導体デバイス製造方法 |
JP4500507B2 (ja) * | 2003-05-20 | 2010-07-14 | キヤノン株式会社 | 移動案内装置及びそれを用いた露光装置 |
-
1980
- 1980-09-30 JP JP13520280A patent/JPS5761436A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5761436A (en) | 1982-04-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0719693Y2 (ja) | 移動テーブル | |
US4763886A (en) | XY-positioning table | |
JP4160824B2 (ja) | 昇降用案内ユニット及びそれを組み込んだステージ装置 | |
JPH0693946B2 (ja) | 自動縫ミシンのx−yテーブル駆動装置 | |
JP2002341076A (ja) | 角度調整テーブル装置 | |
KR20020091076A (ko) | 프레스 장치 | |
JP2526816B2 (ja) | 可動体送り装置 | |
JP2557316Y2 (ja) | 移動テーブル | |
JPH0141466B2 (US20100012521A1-20100121-C00001.png) | ||
JP2523177B2 (ja) | 位置決めテ―ブル | |
JPH0559685U (ja) | 磁気ディスク装置の調整機構 | |
JPH04372318A (ja) | X,y,z駆動装置 | |
JP2004069703A (ja) | 座標測定台 | |
JP2523219Y2 (ja) | 直角座標ロボットのスライド案内機構 | |
JPH052309Y2 (US20100012521A1-20100121-C00001.png) | ||
JP3184371B2 (ja) | シングルプレート型x−yテーブル装置 | |
JPS63300836A (ja) | 微少位置決め機構 | |
JPS6228365Y2 (US20100012521A1-20100121-C00001.png) | ||
JPH11201159A (ja) | ガイド機構 | |
JPH03208533A (ja) | Xyテーブル | |
JPH078463B2 (ja) | テーブルの位置決め機構 | |
JPH0811336B2 (ja) | Xyテーブル | |
JPH018301Y2 (US20100012521A1-20100121-C00001.png) | ||
JP2523978B2 (ja) | 位置決めテ―ブル | |
JPS6122740Y2 (US20100012521A1-20100121-C00001.png) |