JPH0141370B2 - - Google Patents
Info
- Publication number
- JPH0141370B2 JPH0141370B2 JP56177183A JP17718381A JPH0141370B2 JP H0141370 B2 JPH0141370 B2 JP H0141370B2 JP 56177183 A JP56177183 A JP 56177183A JP 17718381 A JP17718381 A JP 17718381A JP H0141370 B2 JPH0141370 B2 JP H0141370B2
- Authority
- JP
- Japan
- Prior art keywords
- adsorption tower
- cryogenic
- gas
- cushion tank
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001179 sorption measurement Methods 0.000 claims description 81
- 238000000926 separation method Methods 0.000 claims description 28
- 230000008929 regeneration Effects 0.000 claims description 24
- 238000011069 regeneration method Methods 0.000 claims description 24
- 238000010926 purge Methods 0.000 claims description 10
- 230000006835 compression Effects 0.000 claims description 7
- 238000007906 compression Methods 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 7
- 238000002203 pretreatment Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 description 25
- 238000000034 method Methods 0.000 description 11
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 5
- 239000001569 carbon dioxide Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 239000002912 waste gas Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000001172 regenerating effect Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Separation By Low-Temperature Treatments (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56177183A JPS5880485A (ja) | 1981-11-06 | 1981-11-06 | クツシヨンタンクの予備加圧法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56177183A JPS5880485A (ja) | 1981-11-06 | 1981-11-06 | クツシヨンタンクの予備加圧法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5880485A JPS5880485A (ja) | 1983-05-14 |
JPH0141370B2 true JPH0141370B2 (US07902200-20110308-C00004.png) | 1989-09-05 |
Family
ID=16026626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56177183A Granted JPS5880485A (ja) | 1981-11-06 | 1981-11-06 | クツシヨンタンクの予備加圧法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5880485A (US07902200-20110308-C00004.png) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4964569A (US07902200-20110308-C00004.png) * | 1972-07-26 | 1974-06-22 | ||
JPS5342182A (en) * | 1976-08-24 | 1978-04-17 | Boc Ltd | Method of separating gas mixture |
-
1981
- 1981-11-06 JP JP56177183A patent/JPS5880485A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4964569A (US07902200-20110308-C00004.png) * | 1972-07-26 | 1974-06-22 | ||
JPS5342182A (en) * | 1976-08-24 | 1978-04-17 | Boc Ltd | Method of separating gas mixture |
Also Published As
Publication number | Publication date |
---|---|
JPS5880485A (ja) | 1983-05-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2833595B2 (ja) | 圧力スイング吸着法 | |
US4566881A (en) | Process and apparatus for producing oxygen with a low proportion of argon from air | |
EP0791388A2 (en) | VSA adsorption process with energy recovery | |
US5620501A (en) | Recovery of trace gases from gas streams | |
JPH04227812A (ja) | 空気からの高窒素ガス回収方法 | |
JPH0429601B2 (US07902200-20110308-C00004.png) | ||
US6017382A (en) | Method of processing semiconductor manufacturing exhaust gases | |
KR970005364A (ko) | 흡착방법 | |
JPH0141370B2 (US07902200-20110308-C00004.png) | ||
JPH0810551A (ja) | 原料ガスから炭酸ガスを除去する方法 | |
JPH01288313A (ja) | 気体分離方法 | |
JPH10272332A (ja) | ガス分離装置及びその運転方法 | |
JPH04371209A (ja) | 圧力差再生方式吸着塔の再生法 | |
JPH11267439A (ja) | ガス分離方法及びこの方法を実施するガス分離装置 | |
JPH0683771B2 (ja) | ガス分離における前処理方法 | |
JPS636481B2 (US07902200-20110308-C00004.png) | ||
JPS63141621A (ja) | 圧力変動式吸着法 | |
JP2988696B2 (ja) | 圧力スイングによる濃縮酸素回収設備における停止方法 | |
JP3369424B2 (ja) | 混合ガス分離方法 | |
JP3121293B2 (ja) | 圧力スイング吸着方式による混合ガス分離方法 | |
JP3727461B2 (ja) | ガス分離方法及び装置 | |
JPH0994424A (ja) | 混合気体の分離装置 | |
JPH0938443A (ja) | 気体分離装置 | |
WO1995033681A1 (fr) | Procede de production d'oxygene par separation apres adsorption par variation de pression | |
JPH0226610A (ja) | 圧力変動吸着分離装置における原料ガスの除湿システム |