JPH0141370B2 - - Google Patents

Info

Publication number
JPH0141370B2
JPH0141370B2 JP56177183A JP17718381A JPH0141370B2 JP H0141370 B2 JPH0141370 B2 JP H0141370B2 JP 56177183 A JP56177183 A JP 56177183A JP 17718381 A JP17718381 A JP 17718381A JP H0141370 B2 JPH0141370 B2 JP H0141370B2
Authority
JP
Japan
Prior art keywords
adsorption tower
cryogenic
gas
cushion tank
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56177183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5880485A (ja
Inventor
Kazuo Someya
Masahiro Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56177183A priority Critical patent/JPS5880485A/ja
Publication of JPS5880485A publication Critical patent/JPS5880485A/ja
Publication of JPH0141370B2 publication Critical patent/JPH0141370B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
JP56177183A 1981-11-06 1981-11-06 クツシヨンタンクの予備加圧法 Granted JPS5880485A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56177183A JPS5880485A (ja) 1981-11-06 1981-11-06 クツシヨンタンクの予備加圧法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56177183A JPS5880485A (ja) 1981-11-06 1981-11-06 クツシヨンタンクの予備加圧法

Publications (2)

Publication Number Publication Date
JPS5880485A JPS5880485A (ja) 1983-05-14
JPH0141370B2 true JPH0141370B2 (US07902200-20110308-C00004.png) 1989-09-05

Family

ID=16026626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56177183A Granted JPS5880485A (ja) 1981-11-06 1981-11-06 クツシヨンタンクの予備加圧法

Country Status (1)

Country Link
JP (1) JPS5880485A (US07902200-20110308-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4964569A (US07902200-20110308-C00004.png) * 1972-07-26 1974-06-22
JPS5342182A (en) * 1976-08-24 1978-04-17 Boc Ltd Method of separating gas mixture

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4964569A (US07902200-20110308-C00004.png) * 1972-07-26 1974-06-22
JPS5342182A (en) * 1976-08-24 1978-04-17 Boc Ltd Method of separating gas mixture

Also Published As

Publication number Publication date
JPS5880485A (ja) 1983-05-14

Similar Documents

Publication Publication Date Title
JP2833595B2 (ja) 圧力スイング吸着法
US4566881A (en) Process and apparatus for producing oxygen with a low proportion of argon from air
EP0791388A2 (en) VSA adsorption process with energy recovery
US5620501A (en) Recovery of trace gases from gas streams
JPH04227812A (ja) 空気からの高窒素ガス回収方法
JPH0429601B2 (US07902200-20110308-C00004.png)
US6017382A (en) Method of processing semiconductor manufacturing exhaust gases
KR970005364A (ko) 흡착방법
JPH0141370B2 (US07902200-20110308-C00004.png)
JPH0810551A (ja) 原料ガスから炭酸ガスを除去する方法
JPH01288313A (ja) 気体分離方法
JPH10272332A (ja) ガス分離装置及びその運転方法
JPH04371209A (ja) 圧力差再生方式吸着塔の再生法
JPH11267439A (ja) ガス分離方法及びこの方法を実施するガス分離装置
JPH0683771B2 (ja) ガス分離における前処理方法
JPS636481B2 (US07902200-20110308-C00004.png)
JPS63141621A (ja) 圧力変動式吸着法
JP2988696B2 (ja) 圧力スイングによる濃縮酸素回収設備における停止方法
JP3369424B2 (ja) 混合ガス分離方法
JP3121293B2 (ja) 圧力スイング吸着方式による混合ガス分離方法
JP3727461B2 (ja) ガス分離方法及び装置
JPH0994424A (ja) 混合気体の分離装置
JPH0938443A (ja) 気体分離装置
WO1995033681A1 (fr) Procede de production d'oxygene par separation apres adsorption par variation de pression
JPH0226610A (ja) 圧力変動吸着分離装置における原料ガスの除湿システム