JPH0141027B2 - - Google Patents
Info
- Publication number
- JPH0141027B2 JPH0141027B2 JP57113168A JP11316882A JPH0141027B2 JP H0141027 B2 JPH0141027 B2 JP H0141027B2 JP 57113168 A JP57113168 A JP 57113168A JP 11316882 A JP11316882 A JP 11316882A JP H0141027 B2 JPH0141027 B2 JP H0141027B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- master
- master pattern
- matching
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W46/00—Marks applied to devices, e.g. for alignment or identification
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W46/00—Marks applied to devices, e.g. for alignment or identification
- H10W46/601—Marks applied to devices, e.g. for alignment or identification for use after dicing
- H10W46/603—Formed on wafers or substrates before dicing and remaining on chips after dicing
Landscapes
- Wire Bonding (AREA)
- Image Analysis (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57113168A JPS594130A (ja) | 1982-06-30 | 1982-06-30 | マスタ−パタ−ンの採取方式 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57113168A JPS594130A (ja) | 1982-06-30 | 1982-06-30 | マスタ−パタ−ンの採取方式 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS594130A JPS594130A (ja) | 1984-01-10 |
| JPH0141027B2 true JPH0141027B2 (enFirst) | 1989-09-01 |
Family
ID=14605272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57113168A Granted JPS594130A (ja) | 1982-06-30 | 1982-06-30 | マスタ−パタ−ンの採取方式 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS594130A (enFirst) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0754549B2 (ja) * | 1984-09-19 | 1995-06-07 | 株式会社日立製作所 | パターンマッチング用標準パターンの作成方法 |
-
1982
- 1982-06-30 JP JP57113168A patent/JPS594130A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS594130A (ja) | 1984-01-10 |
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