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National Institute of Advanced Industrial Science and Technology AIST
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Agency of Industrial Science and Technology
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Application filed by Agency of Industrial Science and TechnologyfiledCriticalAgency of Industrial Science and Technology
Priority to JP59183734ApriorityCriticalpatent/JPS6163512A/ja
Publication of JPS6163512ApublicationCriticalpatent/JPS6163512A/ja
Publication of JPH0140763B2publicationCriticalpatent/JPH0140763B2/ja
Conversion process of chlorine containing polysilanes into silicon carbide: Part II Crystallization of the inorganic amorphous silicon carbide derived from chlorine containing polysilane