JPH0362791B2 - - Google Patents

Info

Publication number
JPH0362791B2
JPH0362791B2 JP60010763A JP1076385A JPH0362791B2 JP H0362791 B2 JPH0362791 B2 JP H0362791B2 JP 60010763 A JP60010763 A JP 60010763A JP 1076385 A JP1076385 A JP 1076385A JP H0362791 B2 JPH0362791 B2 JP H0362791B2
Authority
JP
Japan
Prior art keywords
graphite film
base material
film
carbon
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60010763A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61170570A (ja
Inventor
Jun Shiotani
Yoshinobu Ueha
Hironaga Matsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1076385A priority Critical patent/JPS61170570A/ja
Priority to US06/822,244 priority patent/US4645713A/en
Publication of JPS61170570A publication Critical patent/JPS61170570A/ja
Publication of JPH0362791B2 publication Critical patent/JPH0362791B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1076385A 1985-01-25 1985-01-25 導電性グラフアイト膜の形成方法 Granted JPS61170570A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1076385A JPS61170570A (ja) 1985-01-25 1985-01-25 導電性グラフアイト膜の形成方法
US06/822,244 US4645713A (en) 1985-01-25 1986-01-27 Method for forming conductive graphite film and film formed thereby

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1076385A JPS61170570A (ja) 1985-01-25 1985-01-25 導電性グラフアイト膜の形成方法

Publications (2)

Publication Number Publication Date
JPS61170570A JPS61170570A (ja) 1986-08-01
JPH0362791B2 true JPH0362791B2 (cs) 1991-09-27

Family

ID=11759369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1076385A Granted JPS61170570A (ja) 1985-01-25 1985-01-25 導電性グラフアイト膜の形成方法

Country Status (1)

Country Link
JP (1) JPS61170570A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62124273A (ja) * 1985-11-22 1987-06-05 Agency Of Ind Science & Technol 導電性グラフアイト膜の形成方法
US4795656A (en) * 1986-08-26 1989-01-03 Kozo Iizuka, Director-General, Agency Of Industrial Science And Technology Cluster ion plating method for producing electrically conductive carbon film
JPS63293164A (ja) * 1987-05-27 1988-11-30 Agency Of Ind Science & Technol 炭素材料の製造法
JPS63293163A (ja) * 1987-05-27 1988-11-30 Agency Of Ind Science & Technol 炭素材料の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123476B2 (cs) * 1973-04-12 1976-07-16

Also Published As

Publication number Publication date
JPS61170570A (ja) 1986-08-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term