JPH0140193Y2 - - Google Patents
Info
- Publication number
- JPH0140193Y2 JPH0140193Y2 JP1983106956U JP10695683U JPH0140193Y2 JP H0140193 Y2 JPH0140193 Y2 JP H0140193Y2 JP 1983106956 U JP1983106956 U JP 1983106956U JP 10695683 U JP10695683 U JP 10695683U JP H0140193 Y2 JPH0140193 Y2 JP H0140193Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- utility
- model registration
- wafer
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 33
- 239000007788 liquid Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000005530 etching Methods 0.000 description 11
- 239000002184 metal Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000010408 film Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000003313 weakening effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011796 hollow space material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983106956U JPS6016537U (ja) | 1983-07-09 | 1983-07-09 | 半導体ウエハの片面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983106956U JPS6016537U (ja) | 1983-07-09 | 1983-07-09 | 半導体ウエハの片面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6016537U JPS6016537U (ja) | 1985-02-04 |
| JPH0140193Y2 true JPH0140193Y2 (enrdf_load_stackoverflow) | 1989-12-01 |
Family
ID=30250084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983106956U Granted JPS6016537U (ja) | 1983-07-09 | 1983-07-09 | 半導体ウエハの片面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6016537U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2894451B2 (ja) * | 1989-11-06 | 1999-05-24 | 株式会社荏原製作所 | ジェットスクラバー |
-
1983
- 1983-07-09 JP JP1983106956U patent/JPS6016537U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6016537U (ja) | 1985-02-04 |
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