JPH0136901B2 - - Google Patents
Info
- Publication number
- JPH0136901B2 JPH0136901B2 JP57208075A JP20807582A JPH0136901B2 JP H0136901 B2 JPH0136901 B2 JP H0136901B2 JP 57208075 A JP57208075 A JP 57208075A JP 20807582 A JP20807582 A JP 20807582A JP H0136901 B2 JPH0136901 B2 JP H0136901B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- generating means
- ray generating
- housing
- cover member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002955 isolation Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57208075A JPS5997046A (ja) | 1982-11-26 | 1982-11-26 | 光電子分光分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57208075A JPS5997046A (ja) | 1982-11-26 | 1982-11-26 | 光電子分光分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5997046A JPS5997046A (ja) | 1984-06-04 |
| JPH0136901B2 true JPH0136901B2 (enrdf_load_stackoverflow) | 1989-08-03 |
Family
ID=16550222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57208075A Granted JPS5997046A (ja) | 1982-11-26 | 1982-11-26 | 光電子分光分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5997046A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0668474B2 (ja) * | 1985-06-07 | 1994-08-31 | 日電アネルバ株式会社 | 光電子分析装置 |
-
1982
- 1982-11-26 JP JP57208075A patent/JPS5997046A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5997046A (ja) | 1984-06-04 |
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