JPH0136230B2 - - Google Patents

Info

Publication number
JPH0136230B2
JPH0136230B2 JP56017790A JP1779081A JPH0136230B2 JP H0136230 B2 JPH0136230 B2 JP H0136230B2 JP 56017790 A JP56017790 A JP 56017790A JP 1779081 A JP1779081 A JP 1779081A JP H0136230 B2 JPH0136230 B2 JP H0136230B2
Authority
JP
Japan
Prior art keywords
lens
magnetomotive force
projection lens
distortion aberration
distortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56017790A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57132656A (en
Inventor
Katsushige Tsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56017790A priority Critical patent/JPS57132656A/ja
Publication of JPS57132656A publication Critical patent/JPS57132656A/ja
Publication of JPH0136230B2 publication Critical patent/JPH0136230B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56017790A 1981-02-09 1981-02-09 Image focussing lens system of electron microscope Granted JPS57132656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56017790A JPS57132656A (en) 1981-02-09 1981-02-09 Image focussing lens system of electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56017790A JPS57132656A (en) 1981-02-09 1981-02-09 Image focussing lens system of electron microscope

Publications (2)

Publication Number Publication Date
JPS57132656A JPS57132656A (en) 1982-08-17
JPH0136230B2 true JPH0136230B2 (enrdf_load_stackoverflow) 1989-07-28

Family

ID=11953504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56017790A Granted JPS57132656A (en) 1981-02-09 1981-02-09 Image focussing lens system of electron microscope

Country Status (1)

Country Link
JP (1) JPS57132656A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS57132656A (en) 1982-08-17

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