JPS57132656A - Image focussing lens system of electron microscope - Google Patents

Image focussing lens system of electron microscope

Info

Publication number
JPS57132656A
JPS57132656A JP56017790A JP1779081A JPS57132656A JP S57132656 A JPS57132656 A JP S57132656A JP 56017790 A JP56017790 A JP 56017790A JP 1779081 A JP1779081 A JP 1779081A JP S57132656 A JPS57132656 A JP S57132656A
Authority
JP
Japan
Prior art keywords
lens
magnetomotive force
projection lens
excited
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56017790A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0136230B2 (enrdf_load_stackoverflow
Inventor
Katsushige Tsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56017790A priority Critical patent/JPS57132656A/ja
Publication of JPS57132656A publication Critical patent/JPS57132656A/ja
Publication of JPH0136230B2 publication Critical patent/JPH0136230B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56017790A 1981-02-09 1981-02-09 Image focussing lens system of electron microscope Granted JPS57132656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56017790A JPS57132656A (en) 1981-02-09 1981-02-09 Image focussing lens system of electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56017790A JPS57132656A (en) 1981-02-09 1981-02-09 Image focussing lens system of electron microscope

Publications (2)

Publication Number Publication Date
JPS57132656A true JPS57132656A (en) 1982-08-17
JPH0136230B2 JPH0136230B2 (enrdf_load_stackoverflow) 1989-07-28

Family

ID=11953504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56017790A Granted JPS57132656A (en) 1981-02-09 1981-02-09 Image focussing lens system of electron microscope

Country Status (1)

Country Link
JP (1) JPS57132656A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0136230B2 (enrdf_load_stackoverflow) 1989-07-28

Similar Documents

Publication Publication Date Title
KR900003907B1 (en) Magnetic objective lens for use in a scaning electron microscope
JPS55121259A (en) Elelctron microscope
JPS57105715A (en) Uniform scanning lens having high resolving power
JPS57132656A (en) Image focussing lens system of electron microscope
GB860557A (en) Improvements in or relating to electron beam discharge apparatus
JPS563950A (en) Cathode-ray tube
JPS5346266A (en) Electronic microscope
JPS551187A (en) Electron beam exposure apparatus
JPS57132655A (en) Image focussing lens system of electron microscope
JPS54561A (en) Cathode ray tube of projection type
JPS545373A (en) Projection-type cathode-ray tube
MY118543A (en) A color cathode ray tube
JPS56107459A (en) Objective lens for electron microscope
JPS551186A (en) Electron beam exposure apparatus
JPS5318916A (en) Cathode-ray tube
JPS5613644A (en) Color cathode-ray tube
JPS5767272A (en) Electron lens
JPS5312265A (en) Electron lens
JPS5327359A (en) Electronic microscope prov ided with electron beam deflector
JPS55136445A (en) Beam blanking deflector
JPS56118253A (en) Electron microscope
JPS55113242A (en) Electron gun for picture tube
JPS56130066A (en) Photographing method of microscope image on electron microscope
JPS577058A (en) Focus monitoring method for scan electron microscope
JPS5727552A (en) Electron microscope