JPH0135352B2 - - Google Patents
Info
- Publication number
- JPH0135352B2 JPH0135352B2 JP55062922A JP6292280A JPH0135352B2 JP H0135352 B2 JPH0135352 B2 JP H0135352B2 JP 55062922 A JP55062922 A JP 55062922A JP 6292280 A JP6292280 A JP 6292280A JP H0135352 B2 JPH0135352 B2 JP H0135352B2
- Authority
- JP
- Japan
- Prior art keywords
- mim
- liquid crystal
- crystal display
- display cell
- switch device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004973 liquid crystal related substance Substances 0.000 claims description 41
- 239000010409 thin film Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 8
- 229910052715 tantalum Inorganic materials 0.000 claims description 8
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 6
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 6
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 5
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 5
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 2
- 229910001120 nichrome Inorganic materials 0.000 claims description 2
- HYTUUKNGGKSIDU-UHFFFAOYSA-N dialuminum gold(3+) oxygen(2-) Chemical compound [Au+3].[O-2].[Al+3].[Al+3] HYTUUKNGGKSIDU-UHFFFAOYSA-N 0.000 claims 1
- -1 tantalum-tantalum pentoxide-gold Chemical compound 0.000 claims 1
- 210000004027 cell Anatomy 0.000 description 15
- 239000004020 conductor Substances 0.000 description 15
- 239000010410 layer Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 239000002344 surface layer Substances 0.000 description 4
- 230000005641 tunneling Effects 0.000 description 4
- 238000002048 anodisation reaction Methods 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000010416 ion conductor Substances 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1365—Active matrix addressed cells in which the switching element is a two-electrode device
Landscapes
- Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal Display Device Control (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000328660A CA1121489A (en) | 1979-05-30 | 1979-05-30 | Lcds (liquid crystal displays) controlled by mims (metal-insulator-metal) devices |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2225025A Division JPH03264931A (ja) | 1979-05-30 | 1990-08-27 | 液晶表示装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55161273A JPS55161273A (en) | 1980-12-15 |
| JPH0135352B2 true JPH0135352B2 (enrdf_load_stackoverflow) | 1989-07-25 |
Family
ID=4114308
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6292280A Granted JPS55161273A (en) | 1979-05-30 | 1980-05-14 | Liquid crystal display unit and producing same |
| JP2225025A Pending JPH03264931A (ja) | 1979-05-30 | 1990-08-27 | 液晶表示装置の製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2225025A Pending JPH03264931A (ja) | 1979-05-30 | 1990-08-27 | 液晶表示装置の製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (2) | JPS55161273A (enrdf_load_stackoverflow) |
| CA (1) | CA1121489A (enrdf_load_stackoverflow) |
| GB (1) | GB2050031B (enrdf_load_stackoverflow) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2505070B1 (fr) * | 1981-01-16 | 1986-04-04 | Suwa Seikosha Kk | Dispositif non lineaire pour un panneau d'affichage a cristaux liquides et procede de fabrication d'un tel panneau d'affichage |
| JPS57164786A (en) * | 1981-04-02 | 1982-10-09 | Suwa Seikosha Kk | Dot matrix liquid crystal display unit |
| JPS57179894A (en) * | 1981-04-28 | 1982-11-05 | Suwa Seikosha Kk | Mim liquid crystal display unit |
| JPS57190923A (en) * | 1981-05-20 | 1982-11-24 | Seiko Epson Corp | Color liquid crystal display body |
| JPS57196589A (en) * | 1981-05-28 | 1982-12-02 | Seiko Epson Corp | Manufacture of nonlinear element |
| JPS5814891A (ja) * | 1981-07-20 | 1983-01-27 | セイコーエプソン株式会社 | 液晶表示装置の駆動方法 |
| JPS5870555A (ja) * | 1981-10-22 | 1983-04-27 | Seiko Epson Corp | 液晶表示装置の製造方法 |
| JPS5872183A (ja) * | 1981-10-26 | 1983-04-30 | セイコーエプソン株式会社 | 液晶表示装置 |
| JPS5879281A (ja) * | 1981-11-05 | 1983-05-13 | セイコーエプソン株式会社 | マトリクス型液晶表示装置 |
| JPS58106522A (ja) * | 1981-12-21 | 1983-06-24 | Seiko Epson Corp | 液晶表示装置の製造方法 |
| JPS58189683A (ja) * | 1981-12-25 | 1983-11-05 | セイコーエプソン株式会社 | 液晶表示装置 |
| JPS58123517A (ja) * | 1982-01-19 | 1983-07-22 | Seiko Epson Corp | 液晶表示パネルの製造方法 |
| JPS58168032A (ja) * | 1982-03-29 | 1983-10-04 | Seiko Epson Corp | 電気光学装置の製造方法 |
| DE3229584A1 (de) * | 1982-08-07 | 1984-02-09 | Vdo Adolf Schindling Ag, 6000 Frankfurt | Multiplexbare fluessigkristallzelle |
| JPS5945493A (ja) * | 1982-09-08 | 1984-03-14 | セイコーエプソン株式会社 | 液晶電気光学装置の駆動方法 |
| FR2561423B1 (fr) * | 1984-03-16 | 1987-10-16 | Thomson Csf | Dispositif de visualisation a commande electrique |
| US4698627A (en) * | 1984-04-25 | 1987-10-06 | Energy Conversion Devices, Inc. | Programmable semiconductor switch for a light influencing display and method for making same |
| US4667189A (en) * | 1984-04-25 | 1987-05-19 | Energy Conversion Devices, Inc. | Programmable semiconductor switch for a display matrix or the like and method for making same |
| JPS6194086A (ja) * | 1984-10-16 | 1986-05-12 | セイコーインスツルメンツ株式会社 | 液晶表示装置 |
| JPS61112126A (ja) * | 1984-11-06 | 1986-05-30 | Seiko Epson Corp | 液晶表示体 |
| JPH0617957B2 (ja) * | 1985-05-15 | 1994-03-09 | セイコー電子工業株式会社 | 液晶表示装置 |
| JPS6221126A (ja) * | 1985-07-22 | 1987-01-29 | Shiojiri Kogyo Kk | 液晶表示装置 |
| US4828370A (en) * | 1985-10-04 | 1989-05-09 | Seiko Instruments & Electronics Ltd. | Switching element with nonlinear resistive, nonstoichiometric material |
| JP2816549B2 (ja) * | 1986-10-22 | 1998-10-27 | セイコーインスツルメンツ株式会社 | 電気光学装置 |
| JPH01102434A (ja) * | 1987-10-15 | 1989-04-20 | Sharp Corp | マトリックス型液晶表示パネル |
| JP2870016B2 (ja) * | 1989-05-18 | 1999-03-10 | セイコーエプソン株式会社 | 液晶装置 |
| JP2712046B2 (ja) * | 1989-10-18 | 1998-02-10 | 宇部興産株式会社 | 液晶表示装置 |
| JP2605584B2 (ja) * | 1993-06-28 | 1997-04-30 | セイコーエプソン株式会社 | 液晶電気光学装置 |
| JP3363283B2 (ja) * | 1995-03-23 | 2003-01-08 | 株式会社日立製作所 | 入力装置、入力方法、情報処理システムおよび入力情報の管理方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5178689A (ja) * | 1974-12-28 | 1976-07-08 | Sony Corp | Butsupinkyojihansosochi |
| JPS52149090A (en) * | 1976-06-04 | 1977-12-10 | Seiko Epson Corp | Liquid crystal display device |
-
1979
- 1979-05-30 CA CA000328660A patent/CA1121489A/en not_active Expired
-
1980
- 1980-03-19 GB GB8009246A patent/GB2050031B/en not_active Expired
- 1980-05-14 JP JP6292280A patent/JPS55161273A/ja active Granted
-
1990
- 1990-08-27 JP JP2225025A patent/JPH03264931A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB2050031A (en) | 1980-12-31 |
| JPS55161273A (en) | 1980-12-15 |
| CA1121489A (en) | 1982-04-06 |
| GB2050031B (en) | 1983-10-12 |
| JPH03264931A (ja) | 1991-11-26 |
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