CA1121489A - Lcds (liquid crystal displays) controlled by mims (metal-insulator-metal) devices - Google Patents
Lcds (liquid crystal displays) controlled by mims (metal-insulator-metal) devicesInfo
- Publication number
- CA1121489A CA1121489A CA000328660A CA328660A CA1121489A CA 1121489 A CA1121489 A CA 1121489A CA 000328660 A CA000328660 A CA 000328660A CA 328660 A CA328660 A CA 328660A CA 1121489 A CA1121489 A CA 1121489A
- Authority
- CA
- Canada
- Prior art keywords
- mim
- thin film
- switch
- liquid crystal
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 84
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 22
- 239000002184 metal Substances 0.000 title claims abstract description 22
- 239000010409 thin film Substances 0.000 claims abstract description 38
- 239000011159 matrix material Substances 0.000 claims abstract description 22
- 239000011521 glass Substances 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 17
- 239000010410 layer Substances 0.000 claims description 34
- 238000000151 deposition Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 23
- 239000004020 conductor Substances 0.000 claims description 21
- 230000008021 deposition Effects 0.000 claims description 18
- 229910052715 tantalum Inorganic materials 0.000 claims description 14
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000012212 insulator Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 239000003990 capacitor Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000010931 gold Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000002048 anodisation reaction Methods 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 6
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 6
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 6
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 6
- 239000010408 film Substances 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 238000007743 anodising Methods 0.000 claims description 4
- 230000005684 electric field Effects 0.000 claims description 4
- 229910001120 nichrome Inorganic materials 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 239000004988 Nematic liquid crystal Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000012780 transparent material Substances 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- HYTUUKNGGKSIDU-UHFFFAOYSA-N dialuminum gold(3+) oxygen(2-) Chemical compound [Au+3].[O-2].[Al+3].[Al+3] HYTUUKNGGKSIDU-UHFFFAOYSA-N 0.000 claims 1
- -1 tantalum - tantalum pentoxide - gold Chemical compound 0.000 claims 1
- 210000004027 cell Anatomy 0.000 description 17
- 230000008901 benefit Effects 0.000 description 8
- 238000001465 metallisation Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 101001034843 Mus musculus Interferon-induced transmembrane protein 1 Proteins 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000010416 ion conductor Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1365—Active matrix addressed cells in which the switching element is a two-electrode device
Landscapes
- Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal Display Device Control (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000328660A CA1121489A (en) | 1979-05-30 | 1979-05-30 | Lcds (liquid crystal displays) controlled by mims (metal-insulator-metal) devices |
| GB8009246A GB2050031B (en) | 1979-05-30 | 1980-03-19 | Liquid ceystal displays controlled via metal-insulator-metal devices |
| JP6292280A JPS55161273A (en) | 1979-05-30 | 1980-05-14 | Liquid crystal display unit and producing same |
| JP2225025A JPH03264931A (ja) | 1979-05-30 | 1990-08-27 | 液晶表示装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000328660A CA1121489A (en) | 1979-05-30 | 1979-05-30 | Lcds (liquid crystal displays) controlled by mims (metal-insulator-metal) devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1121489A true CA1121489A (en) | 1982-04-06 |
Family
ID=4114308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000328660A Expired CA1121489A (en) | 1979-05-30 | 1979-05-30 | Lcds (liquid crystal displays) controlled by mims (metal-insulator-metal) devices |
Country Status (3)
| Country | Link |
|---|---|
| JP (2) | JPS55161273A (enrdf_load_stackoverflow) |
| CA (1) | CA1121489A (enrdf_load_stackoverflow) |
| GB (1) | GB2050031B (enrdf_load_stackoverflow) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2505070B1 (fr) * | 1981-01-16 | 1986-04-04 | Suwa Seikosha Kk | Dispositif non lineaire pour un panneau d'affichage a cristaux liquides et procede de fabrication d'un tel panneau d'affichage |
| JPS57164786A (en) * | 1981-04-02 | 1982-10-09 | Suwa Seikosha Kk | Dot matrix liquid crystal display unit |
| JPS57179894A (en) * | 1981-04-28 | 1982-11-05 | Suwa Seikosha Kk | Mim liquid crystal display unit |
| JPS57190923A (en) * | 1981-05-20 | 1982-11-24 | Seiko Epson Corp | Color liquid crystal display body |
| JPS57196589A (en) * | 1981-05-28 | 1982-12-02 | Seiko Epson Corp | Manufacture of nonlinear element |
| JPS5814891A (ja) * | 1981-07-20 | 1983-01-27 | セイコーエプソン株式会社 | 液晶表示装置の駆動方法 |
| JPS5870555A (ja) * | 1981-10-22 | 1983-04-27 | Seiko Epson Corp | 液晶表示装置の製造方法 |
| JPS5872183A (ja) * | 1981-10-26 | 1983-04-30 | セイコーエプソン株式会社 | 液晶表示装置 |
| JPS5879281A (ja) * | 1981-11-05 | 1983-05-13 | セイコーエプソン株式会社 | マトリクス型液晶表示装置 |
| JPS58106522A (ja) * | 1981-12-21 | 1983-06-24 | Seiko Epson Corp | 液晶表示装置の製造方法 |
| JPS58189683A (ja) * | 1981-12-25 | 1983-11-05 | セイコーエプソン株式会社 | 液晶表示装置 |
| JPS58123517A (ja) * | 1982-01-19 | 1983-07-22 | Seiko Epson Corp | 液晶表示パネルの製造方法 |
| JPS58168032A (ja) * | 1982-03-29 | 1983-10-04 | Seiko Epson Corp | 電気光学装置の製造方法 |
| DE3229584A1 (de) * | 1982-08-07 | 1984-02-09 | Vdo Adolf Schindling Ag, 6000 Frankfurt | Multiplexbare fluessigkristallzelle |
| JPS5945493A (ja) * | 1982-09-08 | 1984-03-14 | セイコーエプソン株式会社 | 液晶電気光学装置の駆動方法 |
| FR2561423B1 (fr) * | 1984-03-16 | 1987-10-16 | Thomson Csf | Dispositif de visualisation a commande electrique |
| US4698627A (en) * | 1984-04-25 | 1987-10-06 | Energy Conversion Devices, Inc. | Programmable semiconductor switch for a light influencing display and method for making same |
| US4667189A (en) * | 1984-04-25 | 1987-05-19 | Energy Conversion Devices, Inc. | Programmable semiconductor switch for a display matrix or the like and method for making same |
| JPS6194086A (ja) * | 1984-10-16 | 1986-05-12 | セイコーインスツルメンツ株式会社 | 液晶表示装置 |
| JPS61112126A (ja) * | 1984-11-06 | 1986-05-30 | Seiko Epson Corp | 液晶表示体 |
| JPH0617957B2 (ja) * | 1985-05-15 | 1994-03-09 | セイコー電子工業株式会社 | 液晶表示装置 |
| JPS6221126A (ja) * | 1985-07-22 | 1987-01-29 | Shiojiri Kogyo Kk | 液晶表示装置 |
| US4828370A (en) * | 1985-10-04 | 1989-05-09 | Seiko Instruments & Electronics Ltd. | Switching element with nonlinear resistive, nonstoichiometric material |
| JP2816549B2 (ja) * | 1986-10-22 | 1998-10-27 | セイコーインスツルメンツ株式会社 | 電気光学装置 |
| JPH01102434A (ja) * | 1987-10-15 | 1989-04-20 | Sharp Corp | マトリックス型液晶表示パネル |
| JP2870016B2 (ja) * | 1989-05-18 | 1999-03-10 | セイコーエプソン株式会社 | 液晶装置 |
| JP2712046B2 (ja) * | 1989-10-18 | 1998-02-10 | 宇部興産株式会社 | 液晶表示装置 |
| JP2605584B2 (ja) * | 1993-06-28 | 1997-04-30 | セイコーエプソン株式会社 | 液晶電気光学装置 |
| JP3363283B2 (ja) * | 1995-03-23 | 2003-01-08 | 株式会社日立製作所 | 入力装置、入力方法、情報処理システムおよび入力情報の管理方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5178689A (ja) * | 1974-12-28 | 1976-07-08 | Sony Corp | Butsupinkyojihansosochi |
| JPS52149090A (en) * | 1976-06-04 | 1977-12-10 | Seiko Epson Corp | Liquid crystal display device |
-
1979
- 1979-05-30 CA CA000328660A patent/CA1121489A/en not_active Expired
-
1980
- 1980-03-19 GB GB8009246A patent/GB2050031B/en not_active Expired
- 1980-05-14 JP JP6292280A patent/JPS55161273A/ja active Granted
-
1990
- 1990-08-27 JP JP2225025A patent/JPH03264931A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB2050031A (en) | 1980-12-31 |
| JPS55161273A (en) | 1980-12-15 |
| JPH0135352B2 (enrdf_load_stackoverflow) | 1989-07-25 |
| GB2050031B (en) | 1983-10-12 |
| JPH03264931A (ja) | 1991-11-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1121489A (en) | Lcds (liquid crystal displays) controlled by mims (metal-insulator-metal) devices | |
| US4413883A (en) | Displays controlled by MIM switches of small capacitance | |
| US4223308A (en) | LCDs (Liquid crystal displays) controlled by thin film diode switches | |
| US4251136A (en) | LCDs (Liquid crystal displays) controlled by thin film diode switches | |
| NL194873C (nl) | Dunnefilmtransistorenreeks en daarvan gebruikmakende vloeibare kristalweergeefinrichting. | |
| US5234541A (en) | Methods of fabricating mim type device arrays and display devices incorporating such arrays | |
| US5162901A (en) | Active-matrix display device with added capacitance electrode wire and secondary wire connected thereto | |
| EP0171599B1 (en) | Displays and subassemblies having optimized capacitance | |
| US4997788A (en) | Display device including lateral Schottky diodes | |
| JPH10206845A (ja) | ちらつきのない反射性液晶セル | |
| NL8103377A (nl) | Weergeefinrichting. | |
| JPS5818674A (ja) | 表示装置 | |
| US4944575A (en) | Electrooptical display screen and a method of fabrication of said screen | |
| US4952984A (en) | Display device including lateral schottky diodes | |
| US4828370A (en) | Switching element with nonlinear resistive, nonstoichiometric material | |
| JPH0321929A (ja) | Ｍｉｍデバイスの製造方法及び該デバイスを具える液晶ディスプレイ装置 | |
| US5295008A (en) | Color LCD panel | |
| US5539549A (en) | Active matrix substrate having island electrodes for making ohmic contacts with MIM electrodes and pixel electrodes | |
| US4782337A (en) | Matrix display device comprising two groups of row electrodes and two column electrodes for image element and its control process | |
| CA1106481A (en) | Lcds (liquid crystal displays) controlled by thin film diode switches | |
| CA1124421A (en) | Lcds (liquid crystal displays) controlled by a thin film diode switches | |
| JPH11249177A (ja) | アクティブマトリクス基板およびその製造方法ならびに液晶表示パネル | |
| GB2213987A (en) | MIM devices and liquid crystal display devices incorporating such devices | |
| GB2244858A (en) | MIM type devices for displays | |
| JPH08254707A (ja) | ピクセルエレメント |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry | ||
| MKEX | Expiry |
Effective date: 19990406 |