JPH0134090B2 - - Google Patents

Info

Publication number
JPH0134090B2
JPH0134090B2 JP58098504A JP9850483A JPH0134090B2 JP H0134090 B2 JPH0134090 B2 JP H0134090B2 JP 58098504 A JP58098504 A JP 58098504A JP 9850483 A JP9850483 A JP 9850483A JP H0134090 B2 JPH0134090 B2 JP H0134090B2
Authority
JP
Japan
Prior art keywords
filter
container
filtration
liquid
filters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58098504A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59225716A (ja
Inventor
Toshizo Sugaike
Shigehito Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP58098504A priority Critical patent/JPS59225716A/ja
Publication of JPS59225716A publication Critical patent/JPS59225716A/ja
Publication of JPH0134090B2 publication Critical patent/JPH0134090B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Filtration Of Liquid (AREA)
  • Weting (AREA)
  • Filtering Materials (AREA)
JP58098504A 1983-06-02 1983-06-02 半導体デバイス処理液用のフィルタ装置 Granted JPS59225716A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58098504A JPS59225716A (ja) 1983-06-02 1983-06-02 半導体デバイス処理液用のフィルタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58098504A JPS59225716A (ja) 1983-06-02 1983-06-02 半導体デバイス処理液用のフィルタ装置

Publications (2)

Publication Number Publication Date
JPS59225716A JPS59225716A (ja) 1984-12-18
JPH0134090B2 true JPH0134090B2 (enrdf_load_stackoverflow) 1989-07-18

Family

ID=14221469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58098504A Granted JPS59225716A (ja) 1983-06-02 1983-06-02 半導体デバイス処理液用のフィルタ装置

Country Status (1)

Country Link
JP (1) JPS59225716A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4874516A (en) * 1984-12-29 1989-10-17 Ngk Insulators, Ltd. A ceramic filter for semi-ultrafiltration
JPS61161114A (ja) * 1985-01-04 1986-07-21 Toshiba Ceramics Co Ltd セラミツクフイルタ−の濾過装置およびその洗浄方法
JPS63197510A (ja) * 1987-02-10 1988-08-16 Ngk Insulators Ltd セラミツクフィルタ
JPS63236509A (ja) * 1987-03-24 1988-10-03 Ebara Corp セラミツクスフイルタ−
JP2506378B2 (ja) * 1987-07-24 1996-06-12 東芝セラミックス株式会社 セラミックフィルタ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5515688B2 (enrdf_load_stackoverflow) * 1972-06-10 1980-04-25
CH603211A5 (en) * 1975-12-29 1978-08-15 Commissariat Energie Atomique Tubular filter elements comprising mineral layers on supports
CH608203A5 (en) * 1976-05-07 1978-12-29 Commissariat Energie Atomique Method for manufacturing porous tubular elements

Also Published As

Publication number Publication date
JPS59225716A (ja) 1984-12-18

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