JPH0133006B2 - - Google Patents

Info

Publication number
JPH0133006B2
JPH0133006B2 JP56051106A JP5110681A JPH0133006B2 JP H0133006 B2 JPH0133006 B2 JP H0133006B2 JP 56051106 A JP56051106 A JP 56051106A JP 5110681 A JP5110681 A JP 5110681A JP H0133006 B2 JPH0133006 B2 JP H0133006B2
Authority
JP
Japan
Prior art keywords
sputtering
film
metal
conductive film
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56051106A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57165905A (en
Inventor
Satoru Noguchi
Tomoo Morita
Tsunemitsu Koizumi
Masao Ariga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP5110681A priority Critical patent/JPS57165905A/ja
Publication of JPS57165905A publication Critical patent/JPS57165905A/ja
Publication of JPH0133006B2 publication Critical patent/JPH0133006B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP5110681A 1981-04-07 1981-04-07 Method of forming transparent conductive film Granted JPS57165905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5110681A JPS57165905A (en) 1981-04-07 1981-04-07 Method of forming transparent conductive film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5110681A JPS57165905A (en) 1981-04-07 1981-04-07 Method of forming transparent conductive film

Publications (2)

Publication Number Publication Date
JPS57165905A JPS57165905A (en) 1982-10-13
JPH0133006B2 true JPH0133006B2 (cs) 1989-07-11

Family

ID=12877547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5110681A Granted JPS57165905A (en) 1981-04-07 1981-04-07 Method of forming transparent conductive film

Country Status (1)

Country Link
JP (1) JPS57165905A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6237052U (cs) * 1985-08-23 1987-03-05
JP2604850B2 (ja) * 1989-03-31 1997-04-30 松下電器産業株式会社 スパッタ装置および薄膜製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1336559A (en) * 1970-05-20 1973-11-07 Triplex Safety Glass Co Metal oxide coatings
JPS5510704A (en) * 1978-07-07 1980-01-25 Hitachi Ltd Transparent conductive film and method of manufacturing same

Also Published As

Publication number Publication date
JPS57165905A (en) 1982-10-13

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