JPH0132441B2 - - Google Patents
Info
- Publication number
- JPH0132441B2 JPH0132441B2 JP60165366A JP16536685A JPH0132441B2 JP H0132441 B2 JPH0132441 B2 JP H0132441B2 JP 60165366 A JP60165366 A JP 60165366A JP 16536685 A JP16536685 A JP 16536685A JP H0132441 B2 JPH0132441 B2 JP H0132441B2
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- light
- diffraction
- grating
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16536685A JPS61116605A (ja) | 1985-07-26 | 1985-07-26 | 位置合せ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16536685A JPS61116605A (ja) | 1985-07-26 | 1985-07-26 | 位置合せ装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1008079A Division JPS55101804A (en) | 1979-01-31 | 1979-01-31 | Positioning apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61116605A JPS61116605A (ja) | 1986-06-04 |
| JPH0132441B2 true JPH0132441B2 (enrdf_load_stackoverflow) | 1989-06-30 |
Family
ID=15811001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16536685A Granted JPS61116605A (ja) | 1985-07-26 | 1985-07-26 | 位置合せ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61116605A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2577124Y2 (ja) * | 1994-08-29 | 1998-07-23 | エヌティエヌ株式会社 | スライド装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5332759A (en) * | 1976-09-08 | 1978-03-28 | Nippon Telegr & Teleph Corp <Ntt> | Precision coordinate position detection and position control unit by composite diffration grating method |
-
1985
- 1985-07-26 JP JP16536685A patent/JPS61116605A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61116605A (ja) | 1986-06-04 |
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