JPH0132356Y2 - - Google Patents

Info

Publication number
JPH0132356Y2
JPH0132356Y2 JP1983199929U JP19992983U JPH0132356Y2 JP H0132356 Y2 JPH0132356 Y2 JP H0132356Y2 JP 1983199929 U JP1983199929 U JP 1983199929U JP 19992983 U JP19992983 U JP 19992983U JP H0132356 Y2 JPH0132356 Y2 JP H0132356Y2
Authority
JP
Japan
Prior art keywords
boat
support head
wafer
boat support
work stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983199929U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60111045U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19992983U priority Critical patent/JPS60111045U/ja
Publication of JPS60111045U publication Critical patent/JPS60111045U/ja
Application granted granted Critical
Publication of JPH0132356Y2 publication Critical patent/JPH0132356Y2/ja
Granted legal-status Critical Current

Links

JP19992983U 1983-12-29 1983-12-29 半導体ウエ−ハ用ボ−トの搬送装置 Granted JPS60111045U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19992983U JPS60111045U (ja) 1983-12-29 1983-12-29 半導体ウエ−ハ用ボ−トの搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19992983U JPS60111045U (ja) 1983-12-29 1983-12-29 半導体ウエ−ハ用ボ−トの搬送装置

Publications (2)

Publication Number Publication Date
JPS60111045U JPS60111045U (ja) 1985-07-27
JPH0132356Y2 true JPH0132356Y2 (enExample) 1989-10-03

Family

ID=30760311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19992983U Granted JPS60111045U (ja) 1983-12-29 1983-12-29 半導体ウエ−ハ用ボ−トの搬送装置

Country Status (1)

Country Link
JP (1) JPS60111045U (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678341U (enExample) * 1979-11-09 1981-06-25
JPS59186338A (ja) * 1983-04-07 1984-10-23 Mitsubishi Electric Corp ボ−トエレベ−タ

Also Published As

Publication number Publication date
JPS60111045U (ja) 1985-07-27

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