JPS60111045U - 半導体ウエ−ハ用ボ−トの搬送装置 - Google Patents

半導体ウエ−ハ用ボ−トの搬送装置

Info

Publication number
JPS60111045U
JPS60111045U JP19992983U JP19992983U JPS60111045U JP S60111045 U JPS60111045 U JP S60111045U JP 19992983 U JP19992983 U JP 19992983U JP 19992983 U JP19992983 U JP 19992983U JP S60111045 U JPS60111045 U JP S60111045U
Authority
JP
Japan
Prior art keywords
boat
semiconductor wafer
support head
transport device
wafer boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19992983U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0132356Y2 (enExample
Inventor
古屋　明雪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP19992983U priority Critical patent/JPS60111045U/ja
Publication of JPS60111045U publication Critical patent/JPS60111045U/ja
Application granted granted Critical
Publication of JPH0132356Y2 publication Critical patent/JPH0132356Y2/ja
Granted legal-status Critical Current

Links

JP19992983U 1983-12-29 1983-12-29 半導体ウエ−ハ用ボ−トの搬送装置 Granted JPS60111045U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19992983U JPS60111045U (ja) 1983-12-29 1983-12-29 半導体ウエ−ハ用ボ−トの搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19992983U JPS60111045U (ja) 1983-12-29 1983-12-29 半導体ウエ−ハ用ボ−トの搬送装置

Publications (2)

Publication Number Publication Date
JPS60111045U true JPS60111045U (ja) 1985-07-27
JPH0132356Y2 JPH0132356Y2 (enExample) 1989-10-03

Family

ID=30760311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19992983U Granted JPS60111045U (ja) 1983-12-29 1983-12-29 半導体ウエ−ハ用ボ−トの搬送装置

Country Status (1)

Country Link
JP (1) JPS60111045U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678341U (enExample) * 1979-11-09 1981-06-25
JPS59186338A (ja) * 1983-04-07 1984-10-23 Mitsubishi Electric Corp ボ−トエレベ−タ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678341U (enExample) * 1979-11-09 1981-06-25
JPS59186338A (ja) * 1983-04-07 1984-10-23 Mitsubishi Electric Corp ボ−トエレベ−タ

Also Published As

Publication number Publication date
JPH0132356Y2 (enExample) 1989-10-03

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