JPH0131347Y2 - - Google Patents

Info

Publication number
JPH0131347Y2
JPH0131347Y2 JP1982149450U JP14945082U JPH0131347Y2 JP H0131347 Y2 JPH0131347 Y2 JP H0131347Y2 JP 1982149450 U JP1982149450 U JP 1982149450U JP 14945082 U JP14945082 U JP 14945082U JP H0131347 Y2 JPH0131347 Y2 JP H0131347Y2
Authority
JP
Japan
Prior art keywords
steam
cleaning
cleaning liquid
storage body
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982149450U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5953890U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14945082U priority Critical patent/JPS5953890U/ja
Publication of JPS5953890U publication Critical patent/JPS5953890U/ja
Application granted granted Critical
Publication of JPH0131347Y2 publication Critical patent/JPH0131347Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning In General (AREA)
JP14945082U 1982-10-01 1982-10-01 洗浄装置 Granted JPS5953890U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14945082U JPS5953890U (ja) 1982-10-01 1982-10-01 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14945082U JPS5953890U (ja) 1982-10-01 1982-10-01 洗浄装置

Publications (2)

Publication Number Publication Date
JPS5953890U JPS5953890U (ja) 1984-04-09
JPH0131347Y2 true JPH0131347Y2 (pm) 1989-09-26

Family

ID=30331753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14945082U Granted JPS5953890U (ja) 1982-10-01 1982-10-01 洗浄装置

Country Status (1)

Country Link
JP (1) JPS5953890U (pm)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2752801B2 (ja) * 1991-03-19 1998-05-18 山口日本電気株式会社 半導体集積回路装置の洗浄装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS588378Y2 (ja) * 1977-05-24 1983-02-15 エヌ・テ−・エヌ東洋ベアリング株式会社 物品洗滌装置
JPS5739687U (pm) * 1980-08-14 1982-03-03

Also Published As

Publication number Publication date
JPS5953890U (ja) 1984-04-09

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