JPH01310542A - シリコン・デンドライトウェブを自動的に切断する機械 - Google Patents

シリコン・デンドライトウェブを自動的に切断する機械

Info

Publication number
JPH01310542A
JPH01310542A JP1080221A JP8022189A JPH01310542A JP H01310542 A JPH01310542 A JP H01310542A JP 1080221 A JP1080221 A JP 1080221A JP 8022189 A JP8022189 A JP 8022189A JP H01310542 A JPH01310542 A JP H01310542A
Authority
JP
Japan
Prior art keywords
web
scoring
pieces
machine
workstation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1080221A
Other languages
English (en)
Japanese (ja)
Inventor
Kristen T Schara
クリステン・テリーズ・スカラ
David B Kulik
デビッド・ベネディクト・クリック
Scott E Mcilvaine
スコット・ユーイング・マッキルベイン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Electric Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of JPH01310542A publication Critical patent/JPH01310542A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/32—Methods and apparatus specially adapted for working materials which can easily be split, e.g. mica, slate, schist
    • B28D1/327—Methods and apparatus specially adapted for working materials which can easily be split, e.g. mica, slate, schist for cutting or shearing easily splittable working materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • B23K26/0846—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt for moving elongated workpieces longitudinally, e.g. wire or strip material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
    • B28D5/0023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rectilinearly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
    • H01L21/4814—Conductive parts
    • H01L21/4885—Wire-like parts or pins
    • H01L21/4896—Mechanical treatment, e.g. cutting, bending
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/02—Other than completely through work thickness
    • Y10T83/0333—Scoring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/02—Other than completely through work thickness
    • Y10T83/0333—Scoring
    • Y10T83/0341—Processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Mining & Mineral Resources (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1080221A 1988-04-01 1989-03-30 シリコン・デンドライトウェブを自動的に切断する機械 Pending JPH01310542A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US176,558 1988-04-01
US07/176,558 US4875461A (en) 1988-04-01 1988-04-01 Automatic dendritic silicon web separation machine

Publications (1)

Publication Number Publication Date
JPH01310542A true JPH01310542A (ja) 1989-12-14

Family

ID=22644847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1080221A Pending JPH01310542A (ja) 1988-04-01 1989-03-30 シリコン・デンドライトウェブを自動的に切断する機械

Country Status (6)

Country Link
US (1) US4875461A (enExample)
JP (1) JPH01310542A (enExample)
KR (1) KR0135294B1 (enExample)
AU (1) AU617773B2 (enExample)
FR (1) FR2629379A1 (enExample)
IT (1) IT1228661B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2090308T3 (es) * 1990-01-31 1996-10-16 Bando Kiko Co Maquina para trabajar placa de cristal.
US5791971A (en) * 1996-09-27 1998-08-11 Billco Manufacturing, Inc. Glass cutting machine with linear motor
NL2005686C2 (en) * 2010-05-17 2011-11-21 Bruijne Delden Holding B V De Transport device with endless conveyor belt.
CN106670047B (zh) * 2016-11-23 2019-11-26 阜宁协鑫光伏科技有限公司 一种自动粘棒流水线生产方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4966279A (enExample) * 1972-10-28 1974-06-27
JPS5028753A (enExample) * 1973-07-13 1975-03-24
JPS5160444A (en) * 1974-09-30 1976-05-26 Gen Electric Handotaiueeha oyobi gaiueehaokeiseisuruhoho
JPS5233469A (en) * 1975-09-09 1977-03-14 Siemens Ag Particle beam microscope
JPS52121883A (en) * 1976-04-06 1977-10-13 Toshiba Corp Jet cutting method
JPS6135508A (ja) * 1984-07-27 1986-02-20 Toshiba Corp 半導体ウエハの識別表示方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL284965A (enExample) * 1961-11-17 1900-01-01
FR1572186A (enExample) * 1967-12-12 1969-06-27
US4356944A (en) * 1981-03-06 1982-11-02 Bourns, Inc. Method and apparatus for breaking prescored ceramic substrate plates
US4443685A (en) * 1982-02-17 1984-04-17 Westinghouse Electric Corp. Fixture for laser scribing (of dendrite silicon cells)
US4709483A (en) * 1984-03-14 1987-12-01 Wing Aero Glass cutting device
CA1252711A (en) * 1984-09-27 1989-04-18 Richard A. Herrington Ultra-high pressure abrasive jet cutting of glass
DE3532989A1 (de) * 1985-04-24 1987-03-26 Rudolf Prof Dr In Schweissthal Vorrichtung zur einbringung von kreisfoermigen schnittlinien in gravurschichten
US4653680A (en) * 1985-04-25 1987-03-31 Regan Barrie F Apparatus for breaking semiconductor wafers and the like

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4966279A (enExample) * 1972-10-28 1974-06-27
JPS5028753A (enExample) * 1973-07-13 1975-03-24
JPS5160444A (en) * 1974-09-30 1976-05-26 Gen Electric Handotaiueeha oyobi gaiueehaokeiseisuruhoho
JPS5233469A (en) * 1975-09-09 1977-03-14 Siemens Ag Particle beam microscope
JPS52121883A (en) * 1976-04-06 1977-10-13 Toshiba Corp Jet cutting method
JPS6135508A (ja) * 1984-07-27 1986-02-20 Toshiba Corp 半導体ウエハの識別表示方法

Also Published As

Publication number Publication date
FR2629379B1 (enExample) 1995-03-03
FR2629379A1 (fr) 1989-10-06
US4875461A (en) 1989-10-24
IT1228661B (it) 1991-07-03
AU617773B2 (en) 1991-12-05
KR890016646A (ko) 1989-11-29
KR0135294B1 (ko) 1998-04-25
AU3152889A (en) 1989-10-12
IT8919803A0 (it) 1989-03-16

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