JPH0130787B2 - - Google Patents

Info

Publication number

JPH0130787B2

JPH0130787B2 JP59191671A JP19167184A JPH0130787B2 JP H0130787 B2 JPH0130787 B2 JP H0130787B2 JP 59191671 A JP59191671 A JP 59191671A JP 19167184 A JP19167184 A JP 19167184A JP H0130787 B2 JPH0130787 B2 JP H0130787B2

Authority

JP

Japan

Prior art keywords

glass

capsule

molded body

container

degassing

Prior art date

1984-09-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000011521 glass Substances 0.000 claims description 73
• 238000000034 method Methods 0.000 claims description 36
• 239000002775 capsule Substances 0.000 claims description 34
• 238000007872 degassing Methods 0.000 claims description 19
• 239000000843 powder Substances 0.000 claims description 15
• 125000006850 spacer group Chemical group 0.000 claims description 13
• 239000000919 ceramic Substances 0.000 claims description 12
• 238000001513 hot isostatic pressing Methods 0.000 claims description 7
• 238000004519 manufacturing process Methods 0.000 claims description 5
• 239000011491 glass wool Substances 0.000 claims description 3
• 238000003780 insertion Methods 0.000 claims 1
• 230000037431 insertion Effects 0.000 claims 1
• 238000000465 moulding Methods 0.000 claims 1
• 238000003825 pressing Methods 0.000 claims 1
• 239000000463 material Substances 0.000 description 6
• 230000000694 effects Effects 0.000 description 5
• 238000010438 heat treatment Methods 0.000 description 5
• 229910052581 Si3N4 Inorganic materials 0.000 description 4
• 238000010586 diagram Methods 0.000 description 4
• 238000009776 industrial production Methods 0.000 description 4
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
• 238000005245 sintering Methods 0.000 description 4
• 239000011148 porous material Substances 0.000 description 3
• 238000007789 sealing Methods 0.000 description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
• 230000004888 barrier function Effects 0.000 description 2
• 238000005452 bending Methods 0.000 description 2
• 239000011248 coating agent Substances 0.000 description 2
• 238000000576 coating method Methods 0.000 description 2
• 230000004927 fusion Effects 0.000 description 2
• 229910052751 metal Inorganic materials 0.000 description 2
• 239000002184 metal Substances 0.000 description 2
• 150000002739 metals Chemical class 0.000 description 2
• 229910052799 carbon Inorganic materials 0.000 description 1
• 229910010293 ceramic material Inorganic materials 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 230000002542 deteriorative effect Effects 0.000 description 1
• 238000005538 encapsulation Methods 0.000 description 1
• 239000011888 foil Substances 0.000 description 1
• 229910002804 graphite Inorganic materials 0.000 description 1
• 239000010439 graphite Substances 0.000 description 1
• 239000003921 oil Substances 0.000 description 1
• 230000000704 physical effect Effects 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• 239000002994 raw material Substances 0.000 description 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
• 229910010271 silicon carbide Inorganic materials 0.000 description 1
• 238000005507 spraying Methods 0.000 description 1
• 238000007740 vapor deposition Methods 0.000 description 1